Matches in SemOpenAlex for { <https://semopenalex.org/work/W2094406916> ?p ?o ?g. }
Showing items 1 to 96 of
96
with 100 items per page.
- W2094406916 endingPage "5" @default.
- W2094406916 startingPage "1" @default.
- W2094406916 abstract "Abstract The influence of input power on gate oxide damage due to the `electron shading' effect has been studied on four high-density plasma etch tools. All the tools evaluated inflicted damage on metal-oxide-semiconductor capacitors connected to `shaded antennas'. The damage was reduced with decreasing source power, being consistent with a reported dependence. It is suggested that this source power dependence is caused not only by a change in the ion current but also by changes in the bias voltage and/or the extent of the electron shading. Interestingly, the damage decreased with increasing bias power generally for all the reactors studied. This decrease is shown to be related to an increase in the electron current to the antenna. An equilibrium model fails to explain this dependence. We point out that a more sophisticated evaluation technique and/or analysis model is required." @default.
- W2094406916 created "2016-06-24" @default.
- W2094406916 creator A5004373624 @default.
- W2094406916 creator A5013005567 @default.
- W2094406916 creator A5073398296 @default.
- W2094406916 creator A5076390910 @default.
- W2094406916 creator A5089642171 @default.
- W2094406916 date "1998-03-01" @default.
- W2094406916 modified "2023-09-23" @default.
- W2094406916 title "Power dependence of gate oxide damage from electron shading effect in high-density-plasma metal etching" @default.
- W2094406916 cites W1785115206 @default.
- W2094406916 cites W2000829868 @default.
- W2094406916 cites W2023200833 @default.
- W2094406916 cites W2046198989 @default.
- W2094406916 cites W2060052384 @default.
- W2094406916 cites W2061913617 @default.
- W2094406916 cites W2155559338 @default.
- W2094406916 doi "https://doi.org/10.1016/s0040-6090(98)00378-2" @default.
- W2094406916 hasPublicationYear "1998" @default.
- W2094406916 type Work @default.
- W2094406916 sameAs 2094406916 @default.
- W2094406916 citedByCount "3" @default.
- W2094406916 countsByYear W20944069162019 @default.
- W2094406916 crossrefType "journal-article" @default.
- W2094406916 hasAuthorship W2094406916A5004373624 @default.
- W2094406916 hasAuthorship W2094406916A5013005567 @default.
- W2094406916 hasAuthorship W2094406916A5073398296 @default.
- W2094406916 hasAuthorship W2094406916A5076390910 @default.
- W2094406916 hasAuthorship W2094406916A5089642171 @default.
- W2094406916 hasConcept C100460472 @default.
- W2094406916 hasConcept C107187091 @default.
- W2094406916 hasConcept C119599485 @default.
- W2094406916 hasConcept C121332964 @default.
- W2094406916 hasConcept C121684516 @default.
- W2094406916 hasConcept C125485243 @default.
- W2094406916 hasConcept C127413603 @default.
- W2094406916 hasConcept C130472188 @default.
- W2094406916 hasConcept C147120987 @default.
- W2094406916 hasConcept C165801399 @default.
- W2094406916 hasConcept C171250308 @default.
- W2094406916 hasConcept C172385210 @default.
- W2094406916 hasConcept C177515723 @default.
- W2094406916 hasConcept C191897082 @default.
- W2094406916 hasConcept C192562407 @default.
- W2094406916 hasConcept C2361726 @default.
- W2094406916 hasConcept C2779227376 @default.
- W2094406916 hasConcept C2779851234 @default.
- W2094406916 hasConcept C41008148 @default.
- W2094406916 hasConcept C49040817 @default.
- W2094406916 hasConcept C544153396 @default.
- W2094406916 hasConcept C62520636 @default.
- W2094406916 hasConcept C82706917 @default.
- W2094406916 hasConceptScore W2094406916C100460472 @default.
- W2094406916 hasConceptScore W2094406916C107187091 @default.
- W2094406916 hasConceptScore W2094406916C119599485 @default.
- W2094406916 hasConceptScore W2094406916C121332964 @default.
- W2094406916 hasConceptScore W2094406916C121684516 @default.
- W2094406916 hasConceptScore W2094406916C125485243 @default.
- W2094406916 hasConceptScore W2094406916C127413603 @default.
- W2094406916 hasConceptScore W2094406916C130472188 @default.
- W2094406916 hasConceptScore W2094406916C147120987 @default.
- W2094406916 hasConceptScore W2094406916C165801399 @default.
- W2094406916 hasConceptScore W2094406916C171250308 @default.
- W2094406916 hasConceptScore W2094406916C172385210 @default.
- W2094406916 hasConceptScore W2094406916C177515723 @default.
- W2094406916 hasConceptScore W2094406916C191897082 @default.
- W2094406916 hasConceptScore W2094406916C192562407 @default.
- W2094406916 hasConceptScore W2094406916C2361726 @default.
- W2094406916 hasConceptScore W2094406916C2779227376 @default.
- W2094406916 hasConceptScore W2094406916C2779851234 @default.
- W2094406916 hasConceptScore W2094406916C41008148 @default.
- W2094406916 hasConceptScore W2094406916C49040817 @default.
- W2094406916 hasConceptScore W2094406916C544153396 @default.
- W2094406916 hasConceptScore W2094406916C62520636 @default.
- W2094406916 hasConceptScore W2094406916C82706917 @default.
- W2094406916 hasIssue "1-2" @default.
- W2094406916 hasLocation W20944069161 @default.
- W2094406916 hasOpenAccess W2094406916 @default.
- W2094406916 hasPrimaryLocation W20944069161 @default.
- W2094406916 hasRelatedWork W1544774047 @default.
- W2094406916 hasRelatedWork W2017246694 @default.
- W2094406916 hasRelatedWork W2022949630 @default.
- W2094406916 hasRelatedWork W2049342529 @default.
- W2094406916 hasRelatedWork W2059112004 @default.
- W2094406916 hasRelatedWork W2119343688 @default.
- W2094406916 hasRelatedWork W2139606557 @default.
- W2094406916 hasRelatedWork W2155099757 @default.
- W2094406916 hasRelatedWork W2366161362 @default.
- W2094406916 hasRelatedWork W3197419717 @default.
- W2094406916 hasVolume "316" @default.
- W2094406916 isParatext "false" @default.
- W2094406916 isRetracted "false" @default.
- W2094406916 magId "2094406916" @default.
- W2094406916 workType "article" @default.