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- W2094411245 abstract "The demands of purity of liquid media with low absorbability such as photoresist used in microelectronics production of light oil-products are enhanced at present. Particular attention is given to developing of methods and devices for estimation of liquid purity. In this report the methods and the analyzers, developed at Applied Physics Institute of Ivan Franko State University, intended for checking the content of the microparticles larger than 0.3 micrometers in liquid photoresist or light oil-products are considered." @default.
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- W2094411245 date "1998-04-20" @default.
- W2094411245 modified "2023-09-23" @default.
- W2094411245 title "Methods and devices for check-up of content of contamination in liquid media with low absorbability" @default.
- W2094411245 doi "https://doi.org/10.1117/12.306267" @default.
- W2094411245 hasPublicationYear "1998" @default.
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