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• W2094463492 endingPage "1167" @default.
• W2094463492 startingPage "1164" @default.
• W2094463492 abstract "In micro tactile probing a design trade off must be made between stiff and robust probes. Stiff probes are capable of overcoming surface attraction forces, while delicate flexible probes are capable of making contact with a sensitive part without causing damage. To address this need for both flexible and stiff sensors a novel micro tactile probe has been proposed that makes use of an active suspension structure to modulate probe stiffness as required. In this paper we focus on the initial manufacturing process development of such a sensor. While initial design concepts were created with high precision machining techniques in mind, these are shown to have some fundamental limitations with respect to this specific application. Therefore a design for manufacture strategy was adopted and the structure of the initial design was modified such that it may be manufactured using a chemical etching based process. This paper presents the process followed to successfully adapt an initial sensor design for a chemical etching based manufacturing. Surface 3D microscopy was used to analyse the resulting structure, to demonstrate a significant improvement in device flatness. In addition Finite Element Analysis (COMSOL) was used to estimate the vertical and torsional frequency for the suspension structure which is compared with experimental measurements using a laser vibrometer to show good agreement." @default.
• W2094463492 created "2016-06-24" @default.
• W2094463492 creator A5001238081 @default.
• W2094463492 creator A5028545450 @default.
• W2094463492 creator A5084185483 @default.
• W2094463492 creator A5089374172 @default.
• W2094463492 date "2014-01-01" @default.
• W2094463492 modified "2023-10-16" @default.
• W2094463492 title "Fabrication of a Smart Suspension Structure of Micro Tactile Probing" @default.
• W2094463492 cites W2015361486 @default.
• W2094463492 cites W2057583362 @default.
• W2094463492 doi "https://doi.org/10.1016/j.proeng.2014.11.373" @default.
• W2094463492 hasPublicationYear "2014" @default.
• W2094463492 type Work @default.
• W2094463492 sameAs 2094463492 @default.
• W2094463492 citedByCount "3" @default.
• W2094463492 countsByYear W20944634922016 @default.
• W2094463492 countsByYear W20944634922017 @default.
• W2094463492 countsByYear W20944634922020 @default.
• W2094463492 crossrefType "journal-article" @default.
• W2094463492 hasAuthorship W2094463492A5001238081 @default.
• W2094463492 hasAuthorship W2094463492A5028545450 @default.
• W2094463492 hasAuthorship W2094463492A5084185483 @default.
• W2094463492 hasAuthorship W2094463492A5089374172 @default.
• W2094463492 hasBestOaLocation W20944634921 @default.
• W2094463492 hasConcept C100460472 @default.
• W2094463492 hasConcept C105341887 @default.
• W2094463492 hasConcept C111919701 @default.
• W2094463492 hasConcept C121332964 @default.
• W2094463492 hasConcept C127413603 @default.
• W2094463492 hasConcept C135628077 @default.
• W2094463492 hasConcept C136525101 @default.
• W2094463492 hasConcept C142724271 @default.
• W2094463492 hasConcept C154945302 @default.
• W2094463492 hasConcept C159985019 @default.
• W2094463492 hasConcept C171250308 @default.
• W2094463492 hasConcept C192562407 @default.
• W2094463492 hasConcept C202444582 @default.
• W2094463492 hasConcept C204787440 @default.
• W2094463492 hasConcept C24890656 @default.
• W2094463492 hasConcept C26405456 @default.
• W2094463492 hasConcept C2778530986 @default.
• W2094463492 hasConcept C2779227376 @default.
• W2094463492 hasConcept C2779372316 @default.
• W2094463492 hasConcept C33220542 @default.
• W2094463492 hasConcept C33923547 @default.
• W2094463492 hasConcept C41008148 @default.
• W2094463492 hasConcept C46722567 @default.
• W2094463492 hasConcept C49040817 @default.
• W2094463492 hasConcept C523214423 @default.
• W2094463492 hasConcept C5961521 @default.
• W2094463492 hasConcept C62520636 @default.
• W2094463492 hasConcept C6260449 @default.
• W2094463492 hasConcept C66938386 @default.
• W2094463492 hasConcept C71924100 @default.
• W2094463492 hasConcept C78519656 @default.
• W2094463492 hasConcept C90509273 @default.
• W2094463492 hasConcept C927094 @default.
• W2094463492 hasConcept C96199931 @default.
• W2094463492 hasConcept C98045186 @default.
• W2094463492 hasConceptScore W2094463492C100460472 @default.
• W2094463492 hasConceptScore W2094463492C105341887 @default.
• W2094463492 hasConceptScore W2094463492C111919701 @default.
• W2094463492 hasConceptScore W2094463492C121332964 @default.
• W2094463492 hasConceptScore W2094463492C127413603 @default.
• W2094463492 hasConceptScore W2094463492C135628077 @default.
• W2094463492 hasConceptScore W2094463492C136525101 @default.
• W2094463492 hasConceptScore W2094463492C142724271 @default.
• W2094463492 hasConceptScore W2094463492C154945302 @default.
• W2094463492 hasConceptScore W2094463492C159985019 @default.
• W2094463492 hasConceptScore W2094463492C171250308 @default.
• W2094463492 hasConceptScore W2094463492C192562407 @default.
• W2094463492 hasConceptScore W2094463492C202444582 @default.
• W2094463492 hasConceptScore W2094463492C204787440 @default.
• W2094463492 hasConceptScore W2094463492C24890656 @default.
• W2094463492 hasConceptScore W2094463492C26405456 @default.
• W2094463492 hasConceptScore W2094463492C2778530986 @default.
• W2094463492 hasConceptScore W2094463492C2779227376 @default.
• W2094463492 hasConceptScore W2094463492C2779372316 @default.
• W2094463492 hasConceptScore W2094463492C33220542 @default.
• W2094463492 hasConceptScore W2094463492C33923547 @default.
• W2094463492 hasConceptScore W2094463492C41008148 @default.
• W2094463492 hasConceptScore W2094463492C46722567 @default.
• W2094463492 hasConceptScore W2094463492C49040817 @default.
• W2094463492 hasConceptScore W2094463492C523214423 @default.
• W2094463492 hasConceptScore W2094463492C5961521 @default.
• W2094463492 hasConceptScore W2094463492C62520636 @default.
• W2094463492 hasConceptScore W2094463492C6260449 @default.
• W2094463492 hasConceptScore W2094463492C66938386 @default.
• W2094463492 hasConceptScore W2094463492C71924100 @default.
• W2094463492 hasConceptScore W2094463492C78519656 @default.
• W2094463492 hasConceptScore W2094463492C90509273 @default.
• W2094463492 hasConceptScore W2094463492C927094 @default.
• W2094463492 hasConceptScore W2094463492C96199931 @default.
• W2094463492 hasConceptScore W2094463492C98045186 @default.
• W2094463492 hasLocation W20944634921 @default.
• W2094463492 hasOpenAccess W2094463492 @default.
• W2094463492 hasPrimaryLocation W20944634921 @default.

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