Matches in SemOpenAlex for { <https://semopenalex.org/work/W2094472166> ?p ?o ?g. }
- W2094472166 endingPage "93" @default.
- W2094472166 startingPage "90" @default.
- W2094472166 abstract "Early passivated AlGaN/GaN heterostructure field effect transistors (HFETs) have shown superior device performance compared to their unpassivated counterparts. The opening of gate trenches in the passivation layer by a fluorine based dry-etch process is the crucial step to obtain high-performance devices. Even though oxygen addition to this process has been reported, its effect on the device characteristics has not been studied yet. In this paper, we report the impact of oxygen addition to a fluorine based plasma on two-dimensional electron gas (2DEG) properties as well as on device characteristics of passivated AlGaN/GaN HFETs. It is shown that oxygen addition reduces the fluorine-induced degradation of the 2DEG density. Yet, recovery of the 2DEG density is prevented. Additionally, it is shown that oxygen addition increases the current collapse and therefore decreases the RF performance." @default.
- W2094472166 created "2016-06-24" @default.
- W2094472166 creator A5042867835 @default.
- W2094472166 creator A5043736993 @default.
- W2094472166 creator A5046505569 @default.
- W2094472166 creator A5047103876 @default.
- W2094472166 creator A5049639179 @default.
- W2094472166 creator A5081061359 @default.
- W2094472166 date "2012-01-01" @default.
- W2094472166 modified "2023-10-03" @default.
- W2094472166 title "Oxygen addition to fluorine based SiN etch process: Impact on the electrical properties of AlGaN/GaN 2DEG and transistor characteristics" @default.
- W2094472166 cites W1968590512 @default.
- W2094472166 cites W1970929645 @default.
- W2094472166 cites W2003102320 @default.
- W2094472166 cites W2059947415 @default.
- W2094472166 cites W2084717311 @default.
- W2094472166 cites W2103281872 @default.
- W2094472166 cites W2118318521 @default.
- W2094472166 cites W2119440994 @default.
- W2094472166 cites W2120465859 @default.
- W2094472166 cites W2124985289 @default.
- W2094472166 cites W2129735863 @default.
- W2094472166 cites W2159059784 @default.
- W2094472166 doi "https://doi.org/10.1016/j.sse.2011.09.010" @default.
- W2094472166 hasPublicationYear "2012" @default.
- W2094472166 type Work @default.
- W2094472166 sameAs 2094472166 @default.
- W2094472166 citedByCount "8" @default.
- W2094472166 countsByYear W20944721662012 @default.
- W2094472166 countsByYear W20944721662013 @default.
- W2094472166 countsByYear W20944721662015 @default.
- W2094472166 countsByYear W20944721662017 @default.
- W2094472166 countsByYear W20944721662019 @default.
- W2094472166 crossrefType "journal-article" @default.
- W2094472166 hasAuthorship W2094472166A5042867835 @default.
- W2094472166 hasAuthorship W2094472166A5043736993 @default.
- W2094472166 hasAuthorship W2094472166A5046505569 @default.
- W2094472166 hasAuthorship W2094472166A5047103876 @default.
- W2094472166 hasAuthorship W2094472166A5049639179 @default.
- W2094472166 hasAuthorship W2094472166A5081061359 @default.
- W2094472166 hasConcept C100460472 @default.
- W2094472166 hasConcept C119599485 @default.
- W2094472166 hasConcept C121332964 @default.
- W2094472166 hasConcept C127413603 @default.
- W2094472166 hasConcept C147120987 @default.
- W2094472166 hasConcept C165801399 @default.
- W2094472166 hasConcept C171250308 @default.
- W2094472166 hasConcept C172385210 @default.
- W2094472166 hasConcept C178790620 @default.
- W2094472166 hasConcept C185592680 @default.
- W2094472166 hasConcept C191897082 @default.
- W2094472166 hasConcept C192562407 @default.
- W2094472166 hasConcept C24326235 @default.
- W2094472166 hasConcept C2779227376 @default.
- W2094472166 hasConcept C2779679103 @default.
- W2094472166 hasConcept C33574316 @default.
- W2094472166 hasConcept C49040817 @default.
- W2094472166 hasConcept C506198293 @default.
- W2094472166 hasConcept C540031477 @default.
- W2094472166 hasConcept C62520636 @default.
- W2094472166 hasConcept C79794668 @default.
- W2094472166 hasConcept C85867844 @default.
- W2094472166 hasConceptScore W2094472166C100460472 @default.
- W2094472166 hasConceptScore W2094472166C119599485 @default.
- W2094472166 hasConceptScore W2094472166C121332964 @default.
- W2094472166 hasConceptScore W2094472166C127413603 @default.
- W2094472166 hasConceptScore W2094472166C147120987 @default.
- W2094472166 hasConceptScore W2094472166C165801399 @default.
- W2094472166 hasConceptScore W2094472166C171250308 @default.
- W2094472166 hasConceptScore W2094472166C172385210 @default.
- W2094472166 hasConceptScore W2094472166C178790620 @default.
- W2094472166 hasConceptScore W2094472166C185592680 @default.
- W2094472166 hasConceptScore W2094472166C191897082 @default.
- W2094472166 hasConceptScore W2094472166C192562407 @default.
- W2094472166 hasConceptScore W2094472166C24326235 @default.
- W2094472166 hasConceptScore W2094472166C2779227376 @default.
- W2094472166 hasConceptScore W2094472166C2779679103 @default.
- W2094472166 hasConceptScore W2094472166C33574316 @default.
- W2094472166 hasConceptScore W2094472166C49040817 @default.
- W2094472166 hasConceptScore W2094472166C506198293 @default.
- W2094472166 hasConceptScore W2094472166C540031477 @default.
- W2094472166 hasConceptScore W2094472166C62520636 @default.
- W2094472166 hasConceptScore W2094472166C79794668 @default.
- W2094472166 hasConceptScore W2094472166C85867844 @default.
- W2094472166 hasIssue "1" @default.
- W2094472166 hasLocation W20944721661 @default.
- W2094472166 hasOpenAccess W2094472166 @default.
- W2094472166 hasPrimaryLocation W20944721661 @default.
- W2094472166 hasRelatedWork W1892232335 @default.
- W2094472166 hasRelatedWork W2001792619 @default.
- W2094472166 hasRelatedWork W2034665968 @default.
- W2094472166 hasRelatedWork W2058676402 @default.
- W2094472166 hasRelatedWork W2094472166 @default.
- W2094472166 hasRelatedWork W2139871202 @default.
- W2094472166 hasRelatedWork W2234029579 @default.
- W2094472166 hasRelatedWork W2806297944 @default.
- W2094472166 hasRelatedWork W4293801421 @default.
- W2094472166 hasRelatedWork W2138824396 @default.