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- W2094493140 abstract "Sputtering processes of high-energy incident ions are calculated numerically by using the Monte Carlo method under the assumptions of random arrangement and no inelastic collisions. In the high-energy region, the unscreened Coulomb potential is used, while the hard-sphere type is adopted in the low-energy region. The simulation has been performed for the bombardment by deuterons with energies of 20 keV to l MeV on a silver target. The calculated sputtering ratios agree well with the experimental values. On the basis of these results a new formula for the sputtering ratio is derived by modifying Pease's formula." @default.
- W2094493140 created "2016-06-24" @default.
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- W2094493140 date "1977-04-01" @default.
- W2094493140 modified "2023-10-01" @default.
- W2094493140 title "A Monte Carlo Calculation of High-Energy Sputtering" @default.
- W2094493140 doi "https://doi.org/10.1143/jjap.16.559" @default.
- W2094493140 hasPublicationYear "1977" @default.
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