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- W2094534650 abstract "Rutherford backscattering and Auger-electron spectroscopy measurements reveal that low-energy (500 eV) neutral Ne° beam bombardment on a SiO 2 surface does not cause preferential sputtering of oxygen, whereas Ne + ion beam bombardment of the same energy causes significant preferential sputtering. The results strongly suggest that the ionic charge plays the dominant role in the preferential sputtering of oxygen from SiO 2 . In addition, neutral-beam bombardment modifies the SiO 2 surface to be resistant to reduction by the subsequent ion beam bombardment. It is argued that neutral-beam bombardment produces densified SiO 2 ." @default.
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- W2094534650 title "Preferential Sputtering of Oxygen from SiO<sub>2</sub> by Low-Energy Ion Beam and Neutral Beam Bombardment" @default.
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- W2094534650 doi "https://doi.org/10.1143/jjap.30.l628" @default.
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