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• W2094561449 abstract "The oxidation of transition metal nitrides is examined by atomic force microscopy (AFM) and photoemission electron microscopy (PEEM) in the temperature range of 25–800°C in an ultrahigh vacuum study. The roughness of the surfaces of thin film coatings of vanadium (V), vanadium nitride (VN), titanium nitride (TiN), and TiAlVN, monitored as a function of (a) constant dose of 50000L (1L=10−6Torrs) O2 at various temperatures and (b) oxygen dose at a constant temperature of 800°C, is found to increase for all samples except TiAlVN. The morphological parameters (roughness and oxide grain volume) obtained from AFM are used to determine the extent of oxidation. The activation energy for the growth of oxide on the surface is calculated to be in the range of 0.4–0.5eV for all samples containing V atoms and 1.6eV for TiN. PEEM images of the pristine surfaces of TiN and TiAlVN show surface precipitates of the order of 5–50μm size. The workfunction of all surfaces and precipitates, obtained from photoemission spectra using PEEM, in combination with the effective activation energies measured by AFM, suggests that the main surface precipitate of TiAlVN is VN or VOxNy." @default.
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• W2094561449 date "2007-10-15" @default.
• W2094561449 modified "2023-09-24" @default.
• W2094561449 title "Atomic force microscopy and photoemission electron microscopy study of the low-pressure oxidation of transition metal nitrides" @default.
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• W2094561449 doi "https://doi.org/10.1063/1.2794474" @default.
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