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- W2094567760 abstract "Abstract The carbon bonding modifications, produced by changing the growth conditions, in a-C:N:H films prepared by graphite reactive-sputtering, are investigated by quantitatively analysing the evolution of the D- and G- bands in the Raman spectra. Finding no clear correlation between deposition variables and Raman-analysis results hinders the ready understanding of the effect, produced by the growth parameter variations, in terms of film structural changes. The problem is solved by means of a semi-empirical approach, based on an extended application of Buckingham's theorem. From a suitable combination of the deposition conditions, a dimensionless argument Q is generated, able to account for the film structural-property changes produced by the considered variations of growth-parameters, and the Raman-analysis results are shown to analytically depend on Q . The crucial role of such an argument is discussed. Q is shown to be a reliable quality factor for the deposition of thin a-C:N:H films, as well as to constitute a scaling-law for the growth-process, whose validity is preliminarily demonstrated for variations of r.f. power, total pressure and reactive-gas flow-rate in the ranges from 180 to 300 W, from 4.0 to 5.1 Pa and from 5.2 to 11.4 sccm, respectively. The generality of the proposed method is emphasised." @default.
- W2094567760 created "2016-06-24" @default.
- W2094567760 creator A5044841138 @default.
- W2094567760 creator A5048299135 @default.
- W2094567760 creator A5049655866 @default.
- W2094567760 creator A5053319641 @default.
- W2094567760 date "2002-09-01" @default.
- W2094567760 modified "2023-09-23" @default.
- W2094567760 title "Evidence for the existence of scaling laws correlating the deposition parameters and the Raman spectra features in thin a-C:N:H films deposited by reactive r.f. sputtering" @default.
- W2094567760 cites W1516817720 @default.
- W2094567760 cites W1966144050 @default.
- W2094567760 cites W1975993919 @default.
- W2094567760 cites W1979072343 @default.
- W2094567760 cites W2020113318 @default.
- W2094567760 cites W2067852434 @default.
- W2094567760 cites W2075751118 @default.
- W2094567760 cites W2171898868 @default.
- W2094567760 doi "https://doi.org/10.1016/s0042-207x(02)00245-2" @default.
- W2094567760 hasPublicationYear "2002" @default.
- W2094567760 type Work @default.
- W2094567760 sameAs 2094567760 @default.
- W2094567760 citedByCount "3" @default.
- W2094567760 crossrefType "journal-article" @default.
- W2094567760 hasAuthorship W2094567760A5044841138 @default.
- W2094567760 hasAuthorship W2094567760A5048299135 @default.
- W2094567760 hasAuthorship W2094567760A5049655866 @default.
- W2094567760 hasAuthorship W2094567760A5053319641 @default.
- W2094567760 hasConcept C113196181 @default.
- W2094567760 hasConcept C120665830 @default.
- W2094567760 hasConcept C121332964 @default.
- W2094567760 hasConcept C151730666 @default.
- W2094567760 hasConcept C171250308 @default.
- W2094567760 hasConcept C178790620 @default.
- W2094567760 hasConcept C185592680 @default.
- W2094567760 hasConcept C19067145 @default.
- W2094567760 hasConcept C192562407 @default.
- W2094567760 hasConcept C22423302 @default.
- W2094567760 hasConcept C24872484 @default.
- W2094567760 hasConcept C2524010 @default.
- W2094567760 hasConcept C2780841128 @default.
- W2094567760 hasConcept C2816523 @default.
- W2094567760 hasConcept C33923547 @default.
- W2094567760 hasConcept C40003534 @default.
- W2094567760 hasConcept C64297162 @default.
- W2094567760 hasConcept C86803240 @default.
- W2094567760 hasConcept C97355855 @default.
- W2094567760 hasConcept C99844830 @default.
- W2094567760 hasConceptScore W2094567760C113196181 @default.
- W2094567760 hasConceptScore W2094567760C120665830 @default.
- W2094567760 hasConceptScore W2094567760C121332964 @default.
- W2094567760 hasConceptScore W2094567760C151730666 @default.
- W2094567760 hasConceptScore W2094567760C171250308 @default.
- W2094567760 hasConceptScore W2094567760C178790620 @default.
- W2094567760 hasConceptScore W2094567760C185592680 @default.
- W2094567760 hasConceptScore W2094567760C19067145 @default.
- W2094567760 hasConceptScore W2094567760C192562407 @default.
- W2094567760 hasConceptScore W2094567760C22423302 @default.
- W2094567760 hasConceptScore W2094567760C24872484 @default.
- W2094567760 hasConceptScore W2094567760C2524010 @default.
- W2094567760 hasConceptScore W2094567760C2780841128 @default.
- W2094567760 hasConceptScore W2094567760C2816523 @default.
- W2094567760 hasConceptScore W2094567760C33923547 @default.
- W2094567760 hasConceptScore W2094567760C40003534 @default.
- W2094567760 hasConceptScore W2094567760C64297162 @default.
- W2094567760 hasConceptScore W2094567760C86803240 @default.
- W2094567760 hasConceptScore W2094567760C97355855 @default.
- W2094567760 hasConceptScore W2094567760C99844830 @default.
- W2094567760 hasLocation W20945677601 @default.
- W2094567760 hasOpenAccess W2094567760 @default.
- W2094567760 hasPrimaryLocation W20945677601 @default.
- W2094567760 hasRelatedWork W1965599336 @default.
- W2094567760 hasRelatedWork W1978778763 @default.
- W2094567760 hasRelatedWork W1995189093 @default.
- W2094567760 hasRelatedWork W1999097850 @default.
- W2094567760 hasRelatedWork W2003029386 @default.
- W2094567760 hasRelatedWork W2012034795 @default.
- W2094567760 hasRelatedWork W2028163724 @default.
- W2094567760 hasRelatedWork W2028927377 @default.
- W2094567760 hasRelatedWork W2035834660 @default.
- W2094567760 hasRelatedWork W2046337847 @default.
- W2094567760 hasRelatedWork W2058780445 @default.
- W2094567760 hasRelatedWork W2059523669 @default.
- W2094567760 hasRelatedWork W2069025160 @default.
- W2094567760 hasRelatedWork W2094401329 @default.
- W2094567760 hasRelatedWork W2114259583 @default.
- W2094567760 hasRelatedWork W2141074584 @default.
- W2094567760 hasRelatedWork W2143579459 @default.
- W2094567760 hasRelatedWork W2309534215 @default.
- W2094567760 hasRelatedWork W46480448 @default.
- W2094567760 hasRelatedWork W2521769351 @default.
- W2094567760 isParatext "false" @default.
- W2094567760 isRetracted "false" @default.
- W2094567760 magId "2094567760" @default.
- W2094567760 workType "article" @default.