Matches in SemOpenAlex for { <https://semopenalex.org/work/W2094606657> ?p ?o ?g. }
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with 100 items per page.
- W2094606657 endingPage "388" @default.
- W2094606657 startingPage "382" @default.
- W2094606657 abstract "Abstract A CVD process with a high density of CNTs has been developed on doped silicon material thanks to plasma pre-treatment of the catalyst. With this process small diameter double and triple wall CNTs with an average diameter of 3.8 nm have been grown. The density of the best materials on blanket substrate is larger than 10 12 cm − 2 . These materials have been successfully integrated in via holes with a diameter ranging between 1 µm and 0.3 µm with an equivalent density. In 140 nm hole diameter large 70 nm bundle formations have been observed. In these bundles a density of CNT walls close to 10 13 cm − 2 has been estimated." @default.
- W2094606657 created "2016-06-24" @default.
- W2094606657 creator A5004737862 @default.
- W2094606657 creator A5064395126 @default.
- W2094606657 creator A5064537161 @default.
- W2094606657 creator A5077555036 @default.
- W2094606657 creator A5086424615 @default.
- W2094606657 creator A5091039694 @default.
- W2094606657 date "2010-05-01" @default.
- W2094606657 modified "2023-10-18" @default.
- W2094606657 title "Carbon nanotubes for interconnects in future integrated circuits: The challenge of the density" @default.
- W2094606657 cites W1975979122 @default.
- W2094606657 cites W1988020123 @default.
- W2094606657 cites W2007903791 @default.
- W2094606657 cites W2023420378 @default.
- W2094606657 cites W2027205343 @default.
- W2094606657 cites W2032907607 @default.
- W2094606657 cites W2052132298 @default.
- W2094606657 cites W2076465367 @default.
- W2094606657 cites W2110147750 @default.
- W2094606657 cites W2120551433 @default.
- W2094606657 cites W2146597111 @default.
- W2094606657 cites W2163585067 @default.
- W2094606657 cites W2331215921 @default.
- W2094606657 cites W3098598643 @default.
- W2094606657 cites W4242899486 @default.
- W2094606657 doi "https://doi.org/10.1016/j.diamond.2009.11.017" @default.
- W2094606657 hasPublicationYear "2010" @default.
- W2094606657 type Work @default.
- W2094606657 sameAs 2094606657 @default.
- W2094606657 citedByCount "57" @default.
- W2094606657 countsByYear W20946066572012 @default.
- W2094606657 countsByYear W20946066572013 @default.
- W2094606657 countsByYear W20946066572014 @default.
- W2094606657 countsByYear W20946066572015 @default.
- W2094606657 countsByYear W20946066572016 @default.
- W2094606657 countsByYear W20946066572017 @default.
- W2094606657 countsByYear W20946066572018 @default.
- W2094606657 countsByYear W20946066572019 @default.
- W2094606657 countsByYear W20946066572020 @default.
- W2094606657 countsByYear W20946066572021 @default.
- W2094606657 crossrefType "journal-article" @default.
- W2094606657 hasAuthorship W2094606657A5004737862 @default.
- W2094606657 hasAuthorship W2094606657A5064395126 @default.
- W2094606657 hasAuthorship W2094606657A5064537161 @default.
- W2094606657 hasAuthorship W2094606657A5077555036 @default.
- W2094606657 hasAuthorship W2094606657A5086424615 @default.
- W2094606657 hasAuthorship W2094606657A5091039694 @default.
- W2094606657 hasConcept C104779481 @default.
- W2094606657 hasConcept C119599485 @default.
- W2094606657 hasConcept C121332964 @default.
- W2094606657 hasConcept C127413603 @default.
- W2094606657 hasConcept C134146338 @default.
- W2094606657 hasConcept C140205800 @default.
- W2094606657 hasConcept C159985019 @default.
- W2094606657 hasConcept C171250308 @default.
- W2094606657 hasConcept C192562407 @default.
- W2094606657 hasConcept C49040817 @default.
- W2094606657 hasConcept C513720949 @default.
- W2094606657 hasConcept C530198007 @default.
- W2094606657 hasConcept C61696701 @default.
- W2094606657 hasConceptScore W2094606657C104779481 @default.
- W2094606657 hasConceptScore W2094606657C119599485 @default.
- W2094606657 hasConceptScore W2094606657C121332964 @default.
- W2094606657 hasConceptScore W2094606657C127413603 @default.
- W2094606657 hasConceptScore W2094606657C134146338 @default.
- W2094606657 hasConceptScore W2094606657C140205800 @default.
- W2094606657 hasConceptScore W2094606657C159985019 @default.
- W2094606657 hasConceptScore W2094606657C171250308 @default.
- W2094606657 hasConceptScore W2094606657C192562407 @default.
- W2094606657 hasConceptScore W2094606657C49040817 @default.
- W2094606657 hasConceptScore W2094606657C513720949 @default.
- W2094606657 hasConceptScore W2094606657C530198007 @default.
- W2094606657 hasConceptScore W2094606657C61696701 @default.
- W2094606657 hasIssue "5-6" @default.
- W2094606657 hasLocation W20946066571 @default.
- W2094606657 hasOpenAccess W2094606657 @default.
- W2094606657 hasPrimaryLocation W20946066571 @default.
- W2094606657 hasRelatedWork W1975885491 @default.
- W2094606657 hasRelatedWork W1981524003 @default.
- W2094606657 hasRelatedWork W2077503861 @default.
- W2094606657 hasRelatedWork W2132517077 @default.
- W2094606657 hasRelatedWork W2135411695 @default.
- W2094606657 hasRelatedWork W2324658993 @default.
- W2094606657 hasRelatedWork W2331308819 @default.
- W2094606657 hasRelatedWork W2616971963 @default.
- W2094606657 hasRelatedWork W2732279633 @default.
- W2094606657 hasRelatedWork W4226151451 @default.
- W2094606657 hasVolume "19" @default.
- W2094606657 isParatext "false" @default.
- W2094606657 isRetracted "false" @default.
- W2094606657 magId "2094606657" @default.
- W2094606657 workType "article" @default.