Matches in SemOpenAlex for { <https://semopenalex.org/work/W2094617637> ?p ?o ?g. }
Showing items 1 to 92 of
92
with 100 items per page.
- W2094617637 endingPage "4171" @default.
- W2094617637 startingPage "4169" @default.
- W2094617637 abstract "It has been demonstrated that, by incorporating a thin ∼20 nm Si1−yCy (with y as low as 0.1%) layer at the deep indium implant end-of-range (EOR) region, the EOR defects and enhanced diffusion behavior associated with indium implant can be eliminated. The Si1−yCy layer was grown epitaxially followed by a silicon epitaxy cap of 60 nm. Indium implantations were performed at 1×1014 cm−2 at 115 keV followed by spike annealing at 1050 °C. The experimentally observed EOR defect and enhanced diffusion elimination are explained based on the undersaturation of implantation-induced silicon interstitials with the presence of substitutional carbon at the Si1−yCy layer." @default.
- W2094617637 created "2016-06-24" @default.
- W2094617637 creator A5003581530 @default.
- W2094617637 creator A5021219102 @default.
- W2094617637 creator A5039591359 @default.
- W2094617637 creator A5064681513 @default.
- W2094617637 creator A5068875132 @default.
- W2094617637 creator A5081570006 @default.
- W2094617637 date "2003-11-12" @default.
- W2094617637 modified "2023-10-18" @default.
- W2094617637 title "Influence of substitutional carbon incorporation on implanted-indium-related defects and transient enhanced diffusion" @default.
- W2094617637 cites W1512740714 @default.
- W2094617637 cites W2003725919 @default.
- W2094617637 cites W2009643206 @default.
- W2094617637 cites W2019198705 @default.
- W2094617637 cites W2021378124 @default.
- W2094617637 cites W2048401601 @default.
- W2094617637 cites W2050623209 @default.
- W2094617637 cites W2068104299 @default.
- W2094617637 cites W2070138715 @default.
- W2094617637 doi "https://doi.org/10.1063/1.1628814" @default.
- W2094617637 hasPublicationYear "2003" @default.
- W2094617637 type Work @default.
- W2094617637 sameAs 2094617637 @default.
- W2094617637 citedByCount "10" @default.
- W2094617637 countsByYear W20946176372012 @default.
- W2094617637 countsByYear W20946176372013 @default.
- W2094617637 countsByYear W20946176372015 @default.
- W2094617637 crossrefType "journal-article" @default.
- W2094617637 hasAuthorship W2094617637A5003581530 @default.
- W2094617637 hasAuthorship W2094617637A5021219102 @default.
- W2094617637 hasAuthorship W2094617637A5039591359 @default.
- W2094617637 hasAuthorship W2094617637A5064681513 @default.
- W2094617637 hasAuthorship W2094617637A5068875132 @default.
- W2094617637 hasAuthorship W2094617637A5081570006 @default.
- W2094617637 hasConcept C110738630 @default.
- W2094617637 hasConcept C113196181 @default.
- W2094617637 hasConcept C121332964 @default.
- W2094617637 hasConcept C145148216 @default.
- W2094617637 hasConcept C171250308 @default.
- W2094617637 hasConcept C178790620 @default.
- W2094617637 hasConcept C185592680 @default.
- W2094617637 hasConcept C191897082 @default.
- W2094617637 hasConcept C192562407 @default.
- W2094617637 hasConcept C2777855556 @default.
- W2094617637 hasConcept C2779227376 @default.
- W2094617637 hasConcept C41823505 @default.
- W2094617637 hasConcept C43617362 @default.
- W2094617637 hasConcept C49040817 @default.
- W2094617637 hasConcept C543292547 @default.
- W2094617637 hasConcept C544956773 @default.
- W2094617637 hasConcept C69357855 @default.
- W2094617637 hasConcept C97355855 @default.
- W2094617637 hasConceptScore W2094617637C110738630 @default.
- W2094617637 hasConceptScore W2094617637C113196181 @default.
- W2094617637 hasConceptScore W2094617637C121332964 @default.
- W2094617637 hasConceptScore W2094617637C145148216 @default.
- W2094617637 hasConceptScore W2094617637C171250308 @default.
- W2094617637 hasConceptScore W2094617637C178790620 @default.
- W2094617637 hasConceptScore W2094617637C185592680 @default.
- W2094617637 hasConceptScore W2094617637C191897082 @default.
- W2094617637 hasConceptScore W2094617637C192562407 @default.
- W2094617637 hasConceptScore W2094617637C2777855556 @default.
- W2094617637 hasConceptScore W2094617637C2779227376 @default.
- W2094617637 hasConceptScore W2094617637C41823505 @default.
- W2094617637 hasConceptScore W2094617637C43617362 @default.
- W2094617637 hasConceptScore W2094617637C49040817 @default.
- W2094617637 hasConceptScore W2094617637C543292547 @default.
- W2094617637 hasConceptScore W2094617637C544956773 @default.
- W2094617637 hasConceptScore W2094617637C69357855 @default.
- W2094617637 hasConceptScore W2094617637C97355855 @default.
- W2094617637 hasIssue "20" @default.
- W2094617637 hasLocation W20946176371 @default.
- W2094617637 hasOpenAccess W2094617637 @default.
- W2094617637 hasPrimaryLocation W20946176371 @default.
- W2094617637 hasRelatedWork W1516461839 @default.
- W2094617637 hasRelatedWork W1976157838 @default.
- W2094617637 hasRelatedWork W2012134122 @default.
- W2094617637 hasRelatedWork W2031170839 @default.
- W2094617637 hasRelatedWork W2042925312 @default.
- W2094617637 hasRelatedWork W2048269824 @default.
- W2094617637 hasRelatedWork W2059276252 @default.
- W2094617637 hasRelatedWork W2065258228 @default.
- W2094617637 hasRelatedWork W2065669148 @default.
- W2094617637 hasRelatedWork W2275386326 @default.
- W2094617637 hasVolume "83" @default.
- W2094617637 isParatext "false" @default.
- W2094617637 isRetracted "false" @default.
- W2094617637 magId "2094617637" @default.
- W2094617637 workType "article" @default.