Matches in SemOpenAlex for { <https://semopenalex.org/work/W2094630504> ?p ?o ?g. }
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86
with 100 items per page.
- W2094630504 endingPage "12" @default.
- W2094630504 startingPage "8" @default.
- W2094630504 abstract "Equipment plasma has been modeled semi-empirically using neural networks in conjunction with statistical experimental design. A 3/sup 3/ factorial design was employed to characterize the plasma, in which the variables that were varied include a source power, pressure, and Ar flow rate. As a test data for model validation, 16 experiments were additionally conducted. A total of six plasma attributes were modeled, which include electron density, electron temperature, and plasma potential as well as their spatial uniformities. A planar, inductively coupled plasma was generated in a multipole plasma etch equipment and Langmuir probe was utilized for data collection. Root mean-squared prediction errors measured on the test data are 0.323 (10/sup 11//cm/sup 3/), 0.267 (eV) and 1.141 (V) for electron density, electron temperature, and plasma potential, respectively. Comparisons with a statistical response surface model (RSM) revealed that neural network models are more accurate by an improvement of more than 25% in prediction performance. A similar level of prediction accuracy was also achieved in modeling spatial uniformity data. Consequently, neural networks demonstrated much better prediction capabilities over RSM in modeling complex equipment plasma." @default.
- W2094630504 created "2016-06-24" @default.
- W2094630504 creator A5014471499 @default.
- W2094630504 creator A5088194281 @default.
- W2094630504 date "2001-01-01" @default.
- W2094630504 modified "2023-09-26" @default.
- W2094630504 title "Modeling plasma equipment using neural networks" @default.
- W2094630504 cites W1974869708 @default.
- W2094630504 cites W2028685026 @default.
- W2094630504 cites W2067040550 @default.
- W2094630504 cites W2101827854 @default.
- W2094630504 cites W2118223505 @default.
- W2094630504 cites W2130425902 @default.
- W2094630504 cites W2139034438 @default.
- W2094630504 cites W2152703126 @default.
- W2094630504 cites W2157248966 @default.
- W2094630504 doi "https://doi.org/10.1109/27.912935" @default.
- W2094630504 hasPublicationYear "2001" @default.
- W2094630504 type Work @default.
- W2094630504 sameAs 2094630504 @default.
- W2094630504 citedByCount "17" @default.
- W2094630504 countsByYear W20946305042019 @default.
- W2094630504 crossrefType "journal-article" @default.
- W2094630504 hasAuthorship W2094630504A5014471499 @default.
- W2094630504 hasAuthorship W2094630504A5088194281 @default.
- W2094630504 hasConcept C105795698 @default.
- W2094630504 hasConcept C119857082 @default.
- W2094630504 hasConcept C121332964 @default.
- W2094630504 hasConcept C125485243 @default.
- W2094630504 hasConcept C139945424 @default.
- W2094630504 hasConcept C154945302 @default.
- W2094630504 hasConcept C16469947 @default.
- W2094630504 hasConcept C169222746 @default.
- W2094630504 hasConcept C176118016 @default.
- W2094630504 hasConcept C192039680 @default.
- W2094630504 hasConcept C192562407 @default.
- W2094630504 hasConcept C22175881 @default.
- W2094630504 hasConcept C33923547 @default.
- W2094630504 hasConcept C41008148 @default.
- W2094630504 hasConcept C43503373 @default.
- W2094630504 hasConcept C50644808 @default.
- W2094630504 hasConcept C62520636 @default.
- W2094630504 hasConcept C71907059 @default.
- W2094630504 hasConcept C82706917 @default.
- W2094630504 hasConcept C95974651 @default.
- W2094630504 hasConceptScore W2094630504C105795698 @default.
- W2094630504 hasConceptScore W2094630504C119857082 @default.
- W2094630504 hasConceptScore W2094630504C121332964 @default.
- W2094630504 hasConceptScore W2094630504C125485243 @default.
- W2094630504 hasConceptScore W2094630504C139945424 @default.
- W2094630504 hasConceptScore W2094630504C154945302 @default.
- W2094630504 hasConceptScore W2094630504C16469947 @default.
- W2094630504 hasConceptScore W2094630504C169222746 @default.
- W2094630504 hasConceptScore W2094630504C176118016 @default.
- W2094630504 hasConceptScore W2094630504C192039680 @default.
- W2094630504 hasConceptScore W2094630504C192562407 @default.
- W2094630504 hasConceptScore W2094630504C22175881 @default.
- W2094630504 hasConceptScore W2094630504C33923547 @default.
- W2094630504 hasConceptScore W2094630504C41008148 @default.
- W2094630504 hasConceptScore W2094630504C43503373 @default.
- W2094630504 hasConceptScore W2094630504C50644808 @default.
- W2094630504 hasConceptScore W2094630504C62520636 @default.
- W2094630504 hasConceptScore W2094630504C71907059 @default.
- W2094630504 hasConceptScore W2094630504C82706917 @default.
- W2094630504 hasConceptScore W2094630504C95974651 @default.
- W2094630504 hasIssue "1" @default.
- W2094630504 hasLocation W20946305041 @default.
- W2094630504 hasOpenAccess W2094630504 @default.
- W2094630504 hasPrimaryLocation W20946305041 @default.
- W2094630504 hasRelatedWork W1619276345 @default.
- W2094630504 hasRelatedWork W1970179722 @default.
- W2094630504 hasRelatedWork W1973786430 @default.
- W2094630504 hasRelatedWork W2088270456 @default.
- W2094630504 hasRelatedWork W2117398395 @default.
- W2094630504 hasRelatedWork W2129853958 @default.
- W2094630504 hasRelatedWork W2790125938 @default.
- W2094630504 hasRelatedWork W3161428273 @default.
- W2094630504 hasRelatedWork W3173169590 @default.
- W2094630504 hasRelatedWork W93119083 @default.
- W2094630504 hasVolume "29" @default.
- W2094630504 isParatext "false" @default.
- W2094630504 isRetracted "false" @default.
- W2094630504 magId "2094630504" @default.
- W2094630504 workType "article" @default.