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- W2094666712 abstract "Angular distributions of sputtered atoms have been determined for a Ag target under bombardment with 20 and 30 keV 20Ne+, 40Ar+, 84Kr+ and 132Xe+ ions both at normal and oblique angles of incidence. At normal ion incidence the distribution is symmet with respect to the target normal, while at oblique ion incidence the distribution is asymmetric in the plane containing the ion beam and the surface normal and symmetric in the transverse plane. Scanning electron microscopy of the sputtered surface shows the development of a high density array of cones in the bombarded area. The results are discussed from the viewpoint of sputtering from a very rough surface." @default.
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- W2094666712 date "1985-10-01" @default.
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- W2094666712 title "The angular distribution of sputtered silver atoms" @default.
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- W2094666712 doi "https://doi.org/10.1016/0168-583x(85)90033-3" @default.
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