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- W2094819777 endingPage "533" @default.
- W2094819777 startingPage "528" @default.
- W2094819777 abstract "Abstract Selective and conformal heteroepitaxy of GaAs on silicon using a close-spaced vapor transport (CSVT) process based on a reversible water-vapor transport reaction is described here. In selective epitaxy, a GaAs film is grown preferentially through openings defined in an oxide mask which coats a silicon wafer. For conformal epitaxy, a simple CSVT process has been demonstrated for epitaxial lateral overgrowth of submicron-thick GaAs films in cavities formed on (1 1 1) silicon substrates. Details of a conformal GaAs-on-silicon CSVT technique and experimental results showing its feasibility are presented." @default.
- W2094819777 created "2016-06-24" @default.
- W2094819777 creator A5063538991 @default.
- W2094819777 creator A5075244822 @default.
- W2094819777 creator A5083405361 @default.
- W2094819777 date "2001-05-01" @default.
- W2094819777 modified "2023-09-25" @default.
- W2094819777 title "GaAs-on-silicon conformal vapor-phase epitaxy using reversible transport and selective etching reactions with water vapour" @default.
- W2094819777 cites W1487370130 @default.
- W2094819777 cites W1550901916 @default.
- W2094819777 cites W1975947862 @default.
- W2094819777 cites W1977983256 @default.
- W2094819777 cites W1998903788 @default.
- W2094819777 cites W2001903142 @default.
- W2094819777 cites W2013950788 @default.
- W2094819777 cites W2019829785 @default.
- W2094819777 cites W2020273300 @default.
- W2094819777 cites W2021665419 @default.
- W2094819777 cites W2022808113 @default.
- W2094819777 cites W2034143980 @default.
- W2094819777 cites W2057842922 @default.
- W2094819777 cites W2068048071 @default.
- W2094819777 cites W2069268594 @default.
- W2094819777 cites W2087586594 @default.
- W2094819777 cites W2162130587 @default.
- W2094819777 doi "https://doi.org/10.1016/s0022-0248(01)00947-2" @default.
- W2094819777 hasPublicationYear "2001" @default.
- W2094819777 type Work @default.
- W2094819777 sameAs 2094819777 @default.
- W2094819777 citedByCount "11" @default.
- W2094819777 countsByYear W20948197772012 @default.
- W2094819777 countsByYear W20948197772013 @default.
- W2094819777 countsByYear W20948197772015 @default.
- W2094819777 countsByYear W20948197772016 @default.
- W2094819777 countsByYear W20948197772019 @default.
- W2094819777 countsByYear W20948197772020 @default.
- W2094819777 countsByYear W20948197772021 @default.
- W2094819777 crossrefType "journal-article" @default.
- W2094819777 hasAuthorship W2094819777A5063538991 @default.
- W2094819777 hasAuthorship W2094819777A5075244822 @default.
- W2094819777 hasAuthorship W2094819777A5083405361 @default.
- W2094819777 hasConcept C100460472 @default.
- W2094819777 hasConcept C110738630 @default.
- W2094819777 hasConcept C121332964 @default.
- W2094819777 hasConcept C127413603 @default.
- W2094819777 hasConcept C134306372 @default.
- W2094819777 hasConcept C147534773 @default.
- W2094819777 hasConcept C171250308 @default.
- W2094819777 hasConcept C178790620 @default.
- W2094819777 hasConcept C185592680 @default.
- W2094819777 hasConcept C192562407 @default.
- W2094819777 hasConcept C2779227376 @default.
- W2094819777 hasConcept C3018640491 @default.
- W2094819777 hasConcept C33923547 @default.
- W2094819777 hasConcept C42360764 @default.
- W2094819777 hasConcept C44280652 @default.
- W2094819777 hasConcept C49040817 @default.
- W2094819777 hasConcept C544956773 @default.
- W2094819777 hasConcept C97355855 @default.
- W2094819777 hasConcept C98214594 @default.
- W2094819777 hasConceptScore W2094819777C100460472 @default.
- W2094819777 hasConceptScore W2094819777C110738630 @default.
- W2094819777 hasConceptScore W2094819777C121332964 @default.
- W2094819777 hasConceptScore W2094819777C127413603 @default.
- W2094819777 hasConceptScore W2094819777C134306372 @default.
- W2094819777 hasConceptScore W2094819777C147534773 @default.
- W2094819777 hasConceptScore W2094819777C171250308 @default.
- W2094819777 hasConceptScore W2094819777C178790620 @default.
- W2094819777 hasConceptScore W2094819777C185592680 @default.
- W2094819777 hasConceptScore W2094819777C192562407 @default.
- W2094819777 hasConceptScore W2094819777C2779227376 @default.
- W2094819777 hasConceptScore W2094819777C3018640491 @default.
- W2094819777 hasConceptScore W2094819777C33923547 @default.
- W2094819777 hasConceptScore W2094819777C42360764 @default.
- W2094819777 hasConceptScore W2094819777C44280652 @default.
- W2094819777 hasConceptScore W2094819777C49040817 @default.
- W2094819777 hasConceptScore W2094819777C544956773 @default.
- W2094819777 hasConceptScore W2094819777C97355855 @default.
- W2094819777 hasConceptScore W2094819777C98214594 @default.
- W2094819777 hasIssue "2-4" @default.
- W2094819777 hasLocation W20948197771 @default.
- W2094819777 hasOpenAccess W2094819777 @default.
- W2094819777 hasPrimaryLocation W20948197771 @default.
- W2094819777 hasRelatedWork W165430228 @default.
- W2094819777 hasRelatedWork W1963667882 @default.
- W2094819777 hasRelatedWork W2000975590 @default.
- W2094819777 hasRelatedWork W2003658924 @default.
- W2094819777 hasRelatedWork W2083386337 @default.
- W2094819777 hasRelatedWork W2094819777 @default.
- W2094819777 hasRelatedWork W2168306139 @default.
- W2094819777 hasRelatedWork W2286046742 @default.
- W2094819777 hasRelatedWork W2325923524 @default.
- W2094819777 hasRelatedWork W2556589395 @default.
- W2094819777 hasVolume "225" @default.
- W2094819777 isParatext "false" @default.
- W2094819777 isRetracted "false" @default.
- W2094819777 magId "2094819777" @default.
- W2094819777 workType "article" @default.