Matches in SemOpenAlex for { <https://semopenalex.org/work/W2094866327> ?p ?o ?g. }
- W2094866327 endingPage "2054" @default.
- W2094866327 startingPage "2042" @default.
- W2094866327 abstract "Alloying elements can substantially affect the formation and morphological stability of nickel monosilicide. A comprehensive study of phase formation was performed on 24 Ni alloys with varying concentrations of alloying elements. Silicide films have been used for more than 15 years to contact the source, drain and gate of state-of-the-art complementary-metal-oxide-semiconductor (CMOS) devices. In the past, the addition of alloying elements was shown to improve the transformation from the high resistivity C49 to the low resistivity C54-TiSi2 phase and to allow for the control of surface and interface roughness of CoSi2 films as well as produce significant improvements with respect to agglomeration of the films. Using simultaneous time-resolved X-ray diffraction (XRD), resistance and light scattering measurements, we follow the formation of the silicide phases in real time during rapid thermal annealing. Additions to the Ni–Si system lead to modifications in the phase formation sequence at low temperatures (metal-rich phases), to variations in the formation temperatures of NiSi and NiSi2, and to changes in the agglomeration behavior of the films formed. Of the 24 elements studied, additions of Mo, Re, Ta and W are amongst the most efficient to retard agglomeration while elements such as Pd, Pt and Rh are most efficient to retard the formation of NiSi2." @default.
- W2094866327 created "2016-06-24" @default.
- W2094866327 creator A5007738825 @default.
- W2094866327 creator A5039168166 @default.
- W2094866327 creator A5055791192 @default.
- W2094866327 creator A5061907337 @default.
- W2094866327 creator A5079036985 @default.
- W2094866327 creator A5081407892 @default.
- W2094866327 creator A5087266351 @default.
- W2094866327 date "2006-11-01" @default.
- W2094866327 modified "2023-10-10" @default.
- W2094866327 title "Effects of additive elements on the phase formation and morphological stability of nickel monosilicide films" @default.
- W2094866327 cites W1511337239 @default.
- W2094866327 cites W1558339941 @default.
- W2094866327 cites W1942905179 @default.
- W2094866327 cites W1964377068 @default.
- W2094866327 cites W1973797581 @default.
- W2094866327 cites W1975966290 @default.
- W2094866327 cites W1977219654 @default.
- W2094866327 cites W1977338420 @default.
- W2094866327 cites W1981307776 @default.
- W2094866327 cites W1986920321 @default.
- W2094866327 cites W1990522888 @default.
- W2094866327 cites W1991997053 @default.
- W2094866327 cites W1992023162 @default.
- W2094866327 cites W1993184078 @default.
- W2094866327 cites W1993312286 @default.
- W2094866327 cites W1993545227 @default.
- W2094866327 cites W1993917137 @default.
- W2094866327 cites W1994731406 @default.
- W2094866327 cites W1998030845 @default.
- W2094866327 cites W1999804748 @default.
- W2094866327 cites W1999851457 @default.
- W2094866327 cites W2002455872 @default.
- W2094866327 cites W2004996085 @default.
- W2094866327 cites W2005215588 @default.
- W2094866327 cites W2006607442 @default.
- W2094866327 cites W2006628606 @default.
- W2094866327 cites W2007517112 @default.
- W2094866327 cites W2009037869 @default.
- W2094866327 cites W2009906516 @default.
- W2094866327 cites W2013130178 @default.
- W2094866327 cites W2013141926 @default.
- W2094866327 cites W2013383515 @default.
- W2094866327 cites W2013564712 @default.
- W2094866327 cites W2014709677 @default.
- W2094866327 cites W2019748886 @default.
- W2094866327 cites W2021916799 @default.
- W2094866327 cites W2023392667 @default.
- W2094866327 cites W2024475205 @default.
- W2094866327 cites W2025679171 @default.
- W2094866327 cites W2027758574 @default.
- W2094866327 cites W2029739166 @default.
- W2094866327 cites W2030166898 @default.
- W2094866327 cites W2031761745 @default.
- W2094866327 cites W2032098271 @default.
- W2094866327 cites W2033182613 @default.
- W2094866327 cites W2034353595 @default.
- W2094866327 cites W2036307316 @default.
- W2094866327 cites W2037948734 @default.
- W2094866327 cites W2038945048 @default.
- W2094866327 cites W204343250 @default.
- W2094866327 cites W2045481126 @default.
- W2094866327 cites W2046363145 @default.
- W2094866327 cites W2047659396 @default.
- W2094866327 cites W2050587574 @default.
- W2094866327 cites W2054080819 @default.
- W2094866327 cites W2058745561 @default.
- W2094866327 cites W2060632822 @default.
- W2094866327 cites W2061113837 @default.
- W2094866327 cites W2064656277 @default.
- W2094866327 cites W2072512157 @default.
- W2094866327 cites W2072561627 @default.
- W2094866327 cites W2072736246 @default.
- W2094866327 cites W2075998904 @default.
- W2094866327 cites W2076982249 @default.
- W2094866327 cites W2079111823 @default.
- W2094866327 cites W2079166637 @default.
- W2094866327 cites W2081322445 @default.
- W2094866327 cites W2082821891 @default.
- W2094866327 cites W2083410321 @default.
- W2094866327 cites W2083599189 @default.
- W2094866327 cites W2084331682 @default.
- W2094866327 cites W2087090240 @default.
- W2094866327 cites W2087241604 @default.
- W2094866327 cites W2087526473 @default.
- W2094866327 cites W2093645115 @default.
- W2094866327 cites W2104116876 @default.
- W2094866327 cites W2112130641 @default.
- W2094866327 cites W2117034172 @default.
- W2094866327 cites W2120310567 @default.
- W2094866327 cites W2123614340 @default.
- W2094866327 cites W2128408873 @default.
- W2094866327 cites W2134496139 @default.
- W2094866327 cites W2136290549 @default.
- W2094866327 cites W2142857548 @default.
- W2094866327 cites W2146397192 @default.
- W2094866327 cites W2147772160 @default.