Matches in SemOpenAlex for { <https://semopenalex.org/work/W2094994265> ?p ?o ?g. }
Showing items 1 to 86 of
86
with 100 items per page.
- W2094994265 endingPage "701" @default.
- W2094994265 startingPage "695" @default.
- W2094994265 abstract "Abstract Silicon nitride thin films deposited by reactive ion-beam sputtering are analysed by Auger Electron Spectrometry. Assuming the peak to background ratio to be an intrinsic measurement, the composition of the layers is evaluated by reconstituting the Si-LVV peak recorded in the EN ( E ) mode from a linear combination of Si-LVV peaks measured on clean silicon and on completely nitrided silicon. A good agreement is found between RBS and Auger measurements of the N/Si atomic ratio." @default.
- W2094994265 created "2016-06-24" @default.
- W2094994265 creator A5029635292 @default.
- W2094994265 creator A5042491313 @default.
- W2094994265 date "1985-10-01" @default.
- W2094994265 modified "2023-10-14" @default.
- W2094994265 title "Semi-quantitative in situ Auger analysis of silicon nitride layers deposited by reactive ion beam sputtering" @default.
- W2094994265 cites W2000576296 @default.
- W2094994265 cites W2020552819 @default.
- W2094994265 cites W2023772108 @default.
- W2094994265 cites W2033559982 @default.
- W2094994265 cites W2043297789 @default.
- W2094994265 cites W2043449730 @default.
- W2094994265 cites W2049033610 @default.
- W2094994265 doi "https://doi.org/10.1016/0039-6028(85)90968-9" @default.
- W2094994265 hasPublicationYear "1985" @default.
- W2094994265 type Work @default.
- W2094994265 sameAs 2094994265 @default.
- W2094994265 citedByCount "12" @default.
- W2094994265 countsByYear W20949942652018 @default.
- W2094994265 crossrefType "journal-article" @default.
- W2094994265 hasAuthorship W2094994265A5029635292 @default.
- W2094994265 hasAuthorship W2094994265A5042491313 @default.
- W2094994265 hasConcept C113196181 @default.
- W2094994265 hasConcept C121332964 @default.
- W2094994265 hasConcept C145148216 @default.
- W2094994265 hasConcept C171250308 @default.
- W2094994265 hasConcept C178790620 @default.
- W2094994265 hasConcept C184779094 @default.
- W2094994265 hasConcept C185544564 @default.
- W2094994265 hasConcept C185592680 @default.
- W2094994265 hasConcept C19067145 @default.
- W2094994265 hasConcept C191897082 @default.
- W2094994265 hasConcept C192562407 @default.
- W2094994265 hasConcept C194760766 @default.
- W2094994265 hasConcept C22423302 @default.
- W2094994265 hasConcept C25442681 @default.
- W2094994265 hasConcept C2777431650 @default.
- W2094994265 hasConcept C2777822432 @default.
- W2094994265 hasConcept C2779227376 @default.
- W2094994265 hasConcept C2780646311 @default.
- W2094994265 hasConcept C43617362 @default.
- W2094994265 hasConcept C50774322 @default.
- W2094994265 hasConcept C544956773 @default.
- W2094994265 hasConceptScore W2094994265C113196181 @default.
- W2094994265 hasConceptScore W2094994265C121332964 @default.
- W2094994265 hasConceptScore W2094994265C145148216 @default.
- W2094994265 hasConceptScore W2094994265C171250308 @default.
- W2094994265 hasConceptScore W2094994265C178790620 @default.
- W2094994265 hasConceptScore W2094994265C184779094 @default.
- W2094994265 hasConceptScore W2094994265C185544564 @default.
- W2094994265 hasConceptScore W2094994265C185592680 @default.
- W2094994265 hasConceptScore W2094994265C19067145 @default.
- W2094994265 hasConceptScore W2094994265C191897082 @default.
- W2094994265 hasConceptScore W2094994265C192562407 @default.
- W2094994265 hasConceptScore W2094994265C194760766 @default.
- W2094994265 hasConceptScore W2094994265C22423302 @default.
- W2094994265 hasConceptScore W2094994265C25442681 @default.
- W2094994265 hasConceptScore W2094994265C2777431650 @default.
- W2094994265 hasConceptScore W2094994265C2777822432 @default.
- W2094994265 hasConceptScore W2094994265C2779227376 @default.
- W2094994265 hasConceptScore W2094994265C2780646311 @default.
- W2094994265 hasConceptScore W2094994265C43617362 @default.
- W2094994265 hasConceptScore W2094994265C50774322 @default.
- W2094994265 hasConceptScore W2094994265C544956773 @default.
- W2094994265 hasIssue "1-3" @default.
- W2094994265 hasLocation W20949942651 @default.
- W2094994265 hasOpenAccess W2094994265 @default.
- W2094994265 hasPrimaryLocation W20949942651 @default.
- W2094994265 hasRelatedWork W1558035597 @default.
- W2094994265 hasRelatedWork W1647874339 @default.
- W2094994265 hasRelatedWork W1964256196 @default.
- W2094994265 hasRelatedWork W1995850585 @default.
- W2094994265 hasRelatedWork W2039108638 @default.
- W2094994265 hasRelatedWork W2057904745 @default.
- W2094994265 hasRelatedWork W2063210794 @default.
- W2094994265 hasRelatedWork W2066770160 @default.
- W2094994265 hasRelatedWork W2116292246 @default.
- W2094994265 hasRelatedWork W2148260851 @default.
- W2094994265 hasVolume "162" @default.
- W2094994265 isParatext "false" @default.
- W2094994265 isRetracted "false" @default.
- W2094994265 magId "2094994265" @default.
- W2094994265 workType "article" @default.