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- W2095048932 abstract "Electromagnetic power absorbed in inductively coupled plasma driven by a planar coil has been found directly from axial distributions of the rf electric field and current density measured with magnetic probes. It is shown that at gas pressure around 1 mTorr the absorbed power is much larger than that found from the cold plasma theory, and is in reasonable agreement with the one calculated in the framework of a theory for the anomalous skin effect in a two- dimensional system accounting for spatial dispersion of plasma conductivity." @default.
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- W2095048932 date "1998-04-13" @default.
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- W2095048932 title "Experimental Evidence of Collisionless Power Absorption in Inductively Coupled Plasmas" @default.
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- W2095048932 doi "https://doi.org/10.1103/physrevlett.80.3264" @default.
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