FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2095130110> ?p ?o ?g. }

• W2095130110 endingPage "025019" @default.
• W2095130110 startingPage "025019" @default.
• W2095130110 abstract "Surface acoustic wave (SAW) propagation characteristics in a multilayer structure including a piezoelectric aluminum nitride (AlN) thin film and an epitaxial cubic silicon carbide (3C–SiC) layer on a silicon (Si) substrate are investigated by theoretical calculation in this work. Alternating current (ac) reactive magnetron sputtering was used to deposit highly c-axis-oriented AlN thin films, showing the full width at half maximum (FWHM) of the rocking curve of 1.36° on epitaxial 3C–SiC layers on Si substrates. In addition, conventional two-port SAW devices were fabricated on the AlN/3C–SiC/Si multilayer structure and SAW propagation properties in the multilayer structure were experimentally investigated. The surface wave in the AlN/3C–SiC/Si multilayer structure exhibits a phase velocity of 5528 m s−1 and an electromechanical coupling coefficient of 0.42%. The results demonstrate the potential of AlN thin films grown on epitaxial 3C–SiC layers to create layered SAW devices with higher phase velocities and larger electromechanical coupling coefficients than SAW devices on an AlN/Si multilayer structure. Moreover, the FWHM values of rocking curves of the AlN thin film and 3C–SiC layer remained constant after annealing for 500 h at 540 °C in air atmosphere. Accordingly, the layered SAW devices based on AlN thin films and 3C–SiC layers are applicable to timing and sensing applications in harsh environments." @default.
• W2095130110 created "2016-06-24" @default.
• W2095130110 creator A5021185740 @default.
• W2095130110 creator A5028163527 @default.
• W2095130110 creator A5056320673 @default.
• W2095130110 creator A5069741316 @default.
• W2095130110 creator A5073030203 @default.
• W2095130110 creator A5074400651 @default.
• W2095130110 creator A5083498973 @default.
• W2095130110 date "2013-01-09" @default.
• W2095130110 modified "2023-09-25" @default.
• W2095130110 title "Surface acoustic wave devices on AlN/3C–SiC/Si multilayer structures" @default.
• W2095130110 cites W1976914428 @default.
• W2095130110 cites W1980366897 @default.
• W2095130110 cites W1990224160 @default.
• W2095130110 cites W1991651109 @default.
• W2095130110 cites W1999599822 @default.
• W2095130110 cites W2001133944 @default.
• W2095130110 cites W2002653305 @default.
• W2095130110 cites W2006514057 @default.
• W2095130110 cites W2009883374 @default.
• W2095130110 cites W2010976328 @default.
• W2095130110 cites W2014031909 @default.
• W2095130110 cites W2018760650 @default.
• W2095130110 cites W2031861758 @default.
• W2095130110 cites W2031987695 @default.
• W2095130110 cites W2036729897 @default.
• W2095130110 cites W2040733058 @default.
• W2095130110 cites W2051880652 @default.
• W2095130110 cites W2056400761 @default.
• W2095130110 cites W2060192243 @default.
• W2095130110 cites W2070967937 @default.
• W2095130110 cites W2072974364 @default.
• W2095130110 cites W2079217369 @default.
• W2095130110 cites W2085917189 @default.
• W2095130110 cites W2106060253 @default.
• W2095130110 cites W2116143047 @default.
• W2095130110 cites W2119813758 @default.
• W2095130110 cites W2122430507 @default.
• W2095130110 cites W2128393762 @default.
• W2095130110 cites W2131787650 @default.
• W2095130110 cites W2138245760 @default.
• W2095130110 cites W2139632712 @default.
• W2095130110 cites W2151047153 @default.
• W2095130110 cites W2156586856 @default.
• W2095130110 cites W2157137872 @default.
• W2095130110 cites W2161588257 @default.
• W2095130110 cites W2538582060 @default.
• W2095130110 doi "https://doi.org/10.1088/0960-1317/23/2/025019" @default.
• W2095130110 hasPublicationYear "2013" @default.
• W2095130110 type Work @default.
• W2095130110 sameAs 2095130110 @default.
• W2095130110 citedByCount "59" @default.
• W2095130110 countsByYear W20951301102013 @default.
• W2095130110 countsByYear W20951301102014 @default.
• W2095130110 countsByYear W20951301102015 @default.
• W2095130110 countsByYear W20951301102016 @default.
• W2095130110 countsByYear W20951301102017 @default.
• W2095130110 countsByYear W20951301102018 @default.
• W2095130110 countsByYear W20951301102019 @default.
• W2095130110 countsByYear W20951301102020 @default.
• W2095130110 countsByYear W20951301102021 @default.
• W2095130110 countsByYear W20951301102022 @default.
• W2095130110 countsByYear W20951301102023 @default.
• W2095130110 crossrefType "journal-article" @default.
• W2095130110 hasAuthorship W2095130110A5021185740 @default.
• W2095130110 hasAuthorship W2095130110A5028163527 @default.
• W2095130110 hasAuthorship W2095130110A5056320673 @default.
• W2095130110 hasAuthorship W2095130110A5069741316 @default.
• W2095130110 hasAuthorship W2095130110A5073030203 @default.
• W2095130110 hasAuthorship W2095130110A5074400651 @default.
• W2095130110 hasAuthorship W2095130110A5083498973 @default.
• W2095130110 hasConcept C100082104 @default.
• W2095130110 hasConcept C108649604 @default.
• W2095130110 hasConcept C110738630 @default.
• W2095130110 hasConcept C111368507 @default.
• W2095130110 hasConcept C120665830 @default.
• W2095130110 hasConcept C121332964 @default.
• W2095130110 hasConcept C127313418 @default.
• W2095130110 hasConcept C159985019 @default.
• W2095130110 hasConcept C162954803 @default.
• W2095130110 hasConcept C171250308 @default.
• W2095130110 hasConcept C19067145 @default.
• W2095130110 hasConcept C192562407 @default.
• W2095130110 hasConcept C194760766 @default.
• W2095130110 hasConcept C22423302 @default.
• W2095130110 hasConcept C2777289219 @default.
• W2095130110 hasConcept C2777855556 @default.
• W2095130110 hasConcept C2779227376 @default.
• W2095130110 hasConcept C2780162792 @default.
• W2095130110 hasConcept C2780722187 @default.
• W2095130110 hasConcept C49040817 @default.
• W2095130110 hasConcept C513153333 @default.
• W2095130110 hasConcept C544956773 @default.
• W2095130110 hasConcept C61427134 @default.
• W2095130110 hasConcept C86194701 @default.
• W2095130110 hasConceptScore W2095130110C100082104 @default.
• W2095130110 hasConceptScore W2095130110C108649604 @default.

• next