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- W2095159296 abstract "Structural defects in 4H and 6H SiC wafers have been studied by means of synchrotron X-ray topography and optical microscopy. The effect of seed crystal attachment, orientation, growth face shape, reloading and continued growth are discussed. A comparison between 4H and 6H material is made also. The results relate the origin of different defects to the mentioned growth conditions." @default.
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- W2095159296 date "1997-08-01" @default.
- W2095159296 modified "2023-10-09" @default.
- W2095159296 title "Growth-related structural defects in seeded sublimation-grown SiC" @default.
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- W2095159296 doi "https://doi.org/10.1016/s0925-9635(97)00096-4" @default.
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