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• W2095184910 endingPage "1559" @default.
• W2095184910 startingPage "1554" @default.
• W2095184910 abstract "To reduce the surface roughness of a substrate for mask blanks for extreme ultraviolet (EUV) lithography, the layers of a Mo-Si multilayer structure being deposited by magnetron sputtering were treated with an assisted ion beam. The effectiveness was analyzed by atomic force microscopy, x-ray reflection diffraction, EUV reflectivity measurements, and transmission electron microscopy (TEM). An interface analysis was performed using software that extracts the roughness profile of a Mo/Si interface from a TEM image. The results showed that the treatment produced a large reduction in both interface and surface roughness, resulting in a multilayer with better EUV performance than one formed without such treatment." @default.
• W2095184910 created "2016-06-24" @default.
• W2095184910 creator A5001958215 @default.
• W2095184910 creator A5006380078 @default.
• W2095184910 creator A5042771866 @default.
• W2095184910 creator A5076937568 @default.
• W2095184910 date "2007-08-14" @default.
• W2095184910 modified "2023-09-23" @default.
• W2095184910 title "Effect of interface treatment with assisted ion beam on Mo-Si multilayer formation for mask blanks for extreme ultraviolet lithography" @default.
• W2095184910 cites W1964474923 @default.
• W2095184910 cites W1984801173 @default.
• W2095184910 cites W1993462364 @default.
• W2095184910 cites W2004453925 @default.
• W2095184910 cites W2011043348 @default.
• W2095184910 cites W2033119972 @default.
• W2095184910 cites W2033916201 @default.
• W2095184910 cites W2059747973 @default.
• W2095184910 cites W2077937744 @default.
• W2095184910 cites W2299463417 @default.
• W2095184910 doi "https://doi.org/10.1116/1.2768604" @default.
• W2095184910 hasPublicationYear "2007" @default.
• W2095184910 type Work @default.
• W2095184910 sameAs 2095184910 @default.
• W2095184910 citedByCount "1" @default.
• W2095184910 crossrefType "journal-article" @default.
• W2095184910 hasAuthorship W2095184910A5001958215 @default.
• W2095184910 hasAuthorship W2095184910A5006380078 @default.
• W2095184910 hasAuthorship W2095184910A5042771866 @default.
• W2095184910 hasAuthorship W2095184910A5076937568 @default.
• W2095184910 hasConcept C107365816 @default.
• W2095184910 hasConcept C111368507 @default.
• W2095184910 hasConcept C120665830 @default.
• W2095184910 hasConcept C121332964 @default.
• W2095184910 hasConcept C127313418 @default.
• W2095184910 hasConcept C146024833 @default.
• W2095184910 hasConcept C146088050 @default.
• W2095184910 hasConcept C159985019 @default.
• W2095184910 hasConcept C162996421 @default.
• W2095184910 hasConcept C168834538 @default.
• W2095184910 hasConcept C171250308 @default.
• W2095184910 hasConcept C19067145 @default.
• W2095184910 hasConcept C192562407 @default.
• W2095184910 hasConcept C199360897 @default.
• W2095184910 hasConcept C200274948 @default.
• W2095184910 hasConcept C204223013 @default.
• W2095184910 hasConcept C207114421 @default.
• W2095184910 hasConcept C22423302 @default.
• W2095184910 hasConcept C2777289219 @default.
• W2095184910 hasConcept C2779227376 @default.
• W2095184910 hasConcept C41008148 @default.
• W2095184910 hasConcept C49040817 @default.
• W2095184910 hasConcept C50774322 @default.
• W2095184910 hasConcept C520434653 @default.
• W2095184910 hasConcept C53524968 @default.
• W2095184910 hasConcept C61427134 @default.
• W2095184910 hasConcept C65682993 @default.
• W2095184910 hasConcept C71039073 @default.
• W2095184910 hasConceptScore W2095184910C107365816 @default.
• W2095184910 hasConceptScore W2095184910C111368507 @default.
• W2095184910 hasConceptScore W2095184910C120665830 @default.
• W2095184910 hasConceptScore W2095184910C121332964 @default.
• W2095184910 hasConceptScore W2095184910C127313418 @default.
• W2095184910 hasConceptScore W2095184910C146024833 @default.
• W2095184910 hasConceptScore W2095184910C146088050 @default.
• W2095184910 hasConceptScore W2095184910C159985019 @default.
• W2095184910 hasConceptScore W2095184910C162996421 @default.
• W2095184910 hasConceptScore W2095184910C168834538 @default.
• W2095184910 hasConceptScore W2095184910C171250308 @default.
• W2095184910 hasConceptScore W2095184910C19067145 @default.
• W2095184910 hasConceptScore W2095184910C192562407 @default.
• W2095184910 hasConceptScore W2095184910C199360897 @default.
• W2095184910 hasConceptScore W2095184910C200274948 @default.
• W2095184910 hasConceptScore W2095184910C204223013 @default.
• W2095184910 hasConceptScore W2095184910C207114421 @default.
• W2095184910 hasConceptScore W2095184910C22423302 @default.
• W2095184910 hasConceptScore W2095184910C2777289219 @default.
• W2095184910 hasConceptScore W2095184910C2779227376 @default.
• W2095184910 hasConceptScore W2095184910C41008148 @default.
• W2095184910 hasConceptScore W2095184910C49040817 @default.
• W2095184910 hasConceptScore W2095184910C50774322 @default.
• W2095184910 hasConceptScore W2095184910C520434653 @default.
• W2095184910 hasConceptScore W2095184910C53524968 @default.
• W2095184910 hasConceptScore W2095184910C61427134 @default.
• W2095184910 hasConceptScore W2095184910C65682993 @default.
• W2095184910 hasConceptScore W2095184910C71039073 @default.
• W2095184910 hasIssue "5" @default.
• W2095184910 hasLocation W20951849101 @default.
• W2095184910 hasOpenAccess W2095184910 @default.
• W2095184910 hasPrimaryLocation W20951849101 @default.
• W2095184910 hasRelatedWork W2022796073 @default.
• W2095184910 hasRelatedWork W2032297567 @default.
• W2095184910 hasRelatedWork W2050323439 @default.
• W2095184910 hasRelatedWork W2052625931 @default.
• W2095184910 hasRelatedWork W2081898728 @default.
• W2095184910 hasRelatedWork W2566096607 @default.
• W2095184910 hasRelatedWork W2890054535 @default.
• W2095184910 hasRelatedWork W3013701915 @default.
• W2095184910 hasRelatedWork W3053914760 @default.

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