Matches in SemOpenAlex for { <https://semopenalex.org/work/W2095261653> ?p ?o ?g. }
Showing items 1 to 90 of
90
with 100 items per page.
- W2095261653 endingPage "225" @default.
- W2095261653 startingPage "219" @default.
- W2095261653 abstract "As device structures become smaller they also become more fragile. With the incorporation of metal-high-k layers and shallower implants galvanic corrosion and substrate loss requirements are becoming an important issue. Aqueous chemistries are ceasing to be an option and new solvent cleans are continuously being experimented with. Physical force assisted solvent cleans are increasingly being considered for the removal of particles and resist residues. Whenever a physical force assisted clean is used damage becomes a major concern. In this work the effect of different solvents spray cleans on defect densities over the wafer will be discussed. The damage sites were further analyzed for clusters. The number of defects per cluster for the different solvents was also analyzed. Finally, the cluster size distribution was evaluated for the different solvents." @default.
- W2095261653 created "2016-06-24" @default.
- W2095261653 creator A5005203021 @default.
- W2095261653 creator A5027487134 @default.
- W2095261653 creator A5030807663 @default.
- W2095261653 creator A5042776013 @default.
- W2095261653 creator A5054343410 @default.
- W2095261653 creator A5054961834 @default.
- W2095261653 creator A5056576628 @default.
- W2095261653 creator A5061145610 @default.
- W2095261653 creator A5066530245 @default.
- W2095261653 creator A5087201919 @default.
- W2095261653 date "2019-12-17" @default.
- W2095261653 modified "2023-09-25" @default.
- W2095261653 title "Damage Cluster Analysis of Patterned Wafers during Solvent Spray Cleaning" @default.
- W2095261653 doi "https://doi.org/10.1149/1.3202656" @default.
- W2095261653 hasPublicationYear "2019" @default.
- W2095261653 type Work @default.
- W2095261653 sameAs 2095261653 @default.
- W2095261653 citedByCount "0" @default.
- W2095261653 crossrefType "journal-article" @default.
- W2095261653 hasAuthorship W2095261653A5005203021 @default.
- W2095261653 hasAuthorship W2095261653A5027487134 @default.
- W2095261653 hasAuthorship W2095261653A5030807663 @default.
- W2095261653 hasAuthorship W2095261653A5042776013 @default.
- W2095261653 hasAuthorship W2095261653A5054343410 @default.
- W2095261653 hasAuthorship W2095261653A5054961834 @default.
- W2095261653 hasAuthorship W2095261653A5056576628 @default.
- W2095261653 hasAuthorship W2095261653A5061145610 @default.
- W2095261653 hasAuthorship W2095261653A5066530245 @default.
- W2095261653 hasAuthorship W2095261653A5087201919 @default.
- W2095261653 hasConcept C111368507 @default.
- W2095261653 hasConcept C127313418 @default.
- W2095261653 hasConcept C127413603 @default.
- W2095261653 hasConcept C159985019 @default.
- W2095261653 hasConcept C160671074 @default.
- W2095261653 hasConcept C164866538 @default.
- W2095261653 hasConcept C171250308 @default.
- W2095261653 hasConcept C178790620 @default.
- W2095261653 hasConcept C184651966 @default.
- W2095261653 hasConcept C185592680 @default.
- W2095261653 hasConcept C191897082 @default.
- W2095261653 hasConcept C192562407 @default.
- W2095261653 hasConcept C199360897 @default.
- W2095261653 hasConcept C20625102 @default.
- W2095261653 hasConcept C2777289219 @default.
- W2095261653 hasConcept C2780471494 @default.
- W2095261653 hasConcept C29633239 @default.
- W2095261653 hasConcept C41008148 @default.
- W2095261653 hasConcept C42360764 @default.
- W2095261653 hasConceptScore W2095261653C111368507 @default.
- W2095261653 hasConceptScore W2095261653C127313418 @default.
- W2095261653 hasConceptScore W2095261653C127413603 @default.
- W2095261653 hasConceptScore W2095261653C159985019 @default.
- W2095261653 hasConceptScore W2095261653C160671074 @default.
- W2095261653 hasConceptScore W2095261653C164866538 @default.
- W2095261653 hasConceptScore W2095261653C171250308 @default.
- W2095261653 hasConceptScore W2095261653C178790620 @default.
- W2095261653 hasConceptScore W2095261653C184651966 @default.
- W2095261653 hasConceptScore W2095261653C185592680 @default.
- W2095261653 hasConceptScore W2095261653C191897082 @default.
- W2095261653 hasConceptScore W2095261653C192562407 @default.
- W2095261653 hasConceptScore W2095261653C199360897 @default.
- W2095261653 hasConceptScore W2095261653C20625102 @default.
- W2095261653 hasConceptScore W2095261653C2777289219 @default.
- W2095261653 hasConceptScore W2095261653C2780471494 @default.
- W2095261653 hasConceptScore W2095261653C29633239 @default.
- W2095261653 hasConceptScore W2095261653C41008148 @default.
- W2095261653 hasConceptScore W2095261653C42360764 @default.
- W2095261653 hasIssue "5" @default.
- W2095261653 hasLocation W20952616531 @default.
- W2095261653 hasOpenAccess W2095261653 @default.
- W2095261653 hasPrimaryLocation W20952616531 @default.
- W2095261653 hasRelatedWork W1979321913 @default.
- W2095261653 hasRelatedWork W2095261653 @default.
- W2095261653 hasRelatedWork W2149247853 @default.
- W2095261653 hasRelatedWork W2357618051 @default.
- W2095261653 hasRelatedWork W3097783663 @default.
- W2095261653 hasRelatedWork W3167655063 @default.
- W2095261653 hasRelatedWork W4206655882 @default.
- W2095261653 hasRelatedWork W4248903939 @default.
- W2095261653 hasRelatedWork W4293103072 @default.
- W2095261653 hasRelatedWork W93552598 @default.
- W2095261653 hasVolume "25" @default.
- W2095261653 isParatext "false" @default.
- W2095261653 isRetracted "false" @default.
- W2095261653 magId "2095261653" @default.
- W2095261653 workType "article" @default.