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• W2095335787 abstract "The authors present a linear-regression method based on a five-element circuit model to correct measured capacitance-voltage and conductance-voltage curves. This model explains the effects of series resistance and parasitic capacitance/inductance on the frequency dispersion of measured capacitance and the magnification of measured conductance. These extracted parasitic components show significant dependencies on the geometry of capacitor structure, thereby causing different frequency-dependent capacitance characteristics in measurements." @default.
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• W2095335787 date "2009-01-01" @default.
• W2095335787 modified "2023-10-18" @default.
• W2095335787 title "Five-element circuit model using linear-regression method to correct the admittance measurement of metal-oxide-semiconductor capacitor" @default.
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• W2095335787 doi "https://doi.org/10.1116/1.3058724" @default.
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