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- W2095384123 abstract "Abstract Carrier lifetime characterizes the return to equilibrium in a semiconductor by recombination and generation of carriers. Its value affects the performance of many silicon devices. Ion implantation is an emerging method whereby lifetime can be reduced. A major advantage of this method is the possibility of three-dimentional localization of regions of low lifetime within devices and integrated circuits. Argon and proton implantation are discussed as examples of two different approaches to localization; one relies on thermal stability of damage, and the other on the nonuniform energy deposition profile of ions coming to rest in matter. Proton implantation and electron irradiation are compared in an application of lifetime control to insulated gate transistors. It is shown that device performance is improved with proton implantation if the appropriate energy is used." @default.
- W2095384123 created "2016-06-24" @default.
- W2095384123 creator A5073907637 @default.
- W2095384123 date "1987-04-01" @default.
- W2095384123 modified "2023-09-27" @default.
- W2095384123 title "Ion implantation for carrier lifetime control in silicon technology" @default.
- W2095384123 cites W1990720474 @default.
- W2095384123 cites W2016069151 @default.
- W2095384123 cites W2048561172 @default.
- W2095384123 cites W2053723470 @default.
- W2095384123 cites W2078620650 @default.
- W2095384123 cites W2088709252 @default.
- W2095384123 cites W2115606391 @default.
- W2095384123 cites W2127772342 @default.
- W2095384123 cites W2142971873 @default.
- W2095384123 cites W2158206821 @default.
- W2095384123 cites W2165459611 @default.
- W2095384123 cites W2494319361 @default.
- W2095384123 cites W2798726572 @default.
- W2095384123 doi "https://doi.org/10.1016/0168-583x(87)90703-8" @default.
- W2095384123 hasPublicationYear "1987" @default.
- W2095384123 type Work @default.
- W2095384123 sameAs 2095384123 @default.
- W2095384123 citedByCount "2" @default.
- W2095384123 countsByYear W20953841232012 @default.
- W2095384123 crossrefType "journal-article" @default.
- W2095384123 hasAuthorship W2095384123A5073907637 @default.
- W2095384123 hasConcept C108225325 @default.
- W2095384123 hasConcept C111337013 @default.
- W2095384123 hasConcept C119599485 @default.
- W2095384123 hasConcept C121332964 @default.
- W2095384123 hasConcept C127413603 @default.
- W2095384123 hasConcept C145148216 @default.
- W2095384123 hasConcept C147120987 @default.
- W2095384123 hasConcept C165801399 @default.
- W2095384123 hasConcept C171250308 @default.
- W2095384123 hasConcept C172385210 @default.
- W2095384123 hasConcept C178790620 @default.
- W2095384123 hasConcept C184779094 @default.
- W2095384123 hasConcept C185544564 @default.
- W2095384123 hasConcept C185592680 @default.
- W2095384123 hasConcept C192562407 @default.
- W2095384123 hasConcept C198865614 @default.
- W2095384123 hasConcept C2779227376 @default.
- W2095384123 hasConcept C41823505 @default.
- W2095384123 hasConcept C49040817 @default.
- W2095384123 hasConcept C544956773 @default.
- W2095384123 hasConcept C54516573 @default.
- W2095384123 hasConcept C79635011 @default.
- W2095384123 hasConceptScore W2095384123C108225325 @default.
- W2095384123 hasConceptScore W2095384123C111337013 @default.
- W2095384123 hasConceptScore W2095384123C119599485 @default.
- W2095384123 hasConceptScore W2095384123C121332964 @default.
- W2095384123 hasConceptScore W2095384123C127413603 @default.
- W2095384123 hasConceptScore W2095384123C145148216 @default.
- W2095384123 hasConceptScore W2095384123C147120987 @default.
- W2095384123 hasConceptScore W2095384123C165801399 @default.
- W2095384123 hasConceptScore W2095384123C171250308 @default.
- W2095384123 hasConceptScore W2095384123C172385210 @default.
- W2095384123 hasConceptScore W2095384123C178790620 @default.
- W2095384123 hasConceptScore W2095384123C184779094 @default.
- W2095384123 hasConceptScore W2095384123C185544564 @default.
- W2095384123 hasConceptScore W2095384123C185592680 @default.
- W2095384123 hasConceptScore W2095384123C192562407 @default.
- W2095384123 hasConceptScore W2095384123C198865614 @default.
- W2095384123 hasConceptScore W2095384123C2779227376 @default.
- W2095384123 hasConceptScore W2095384123C41823505 @default.
- W2095384123 hasConceptScore W2095384123C49040817 @default.
- W2095384123 hasConceptScore W2095384123C544956773 @default.
- W2095384123 hasConceptScore W2095384123C54516573 @default.
- W2095384123 hasConceptScore W2095384123C79635011 @default.
- W2095384123 hasLocation W20953841231 @default.
- W2095384123 hasOpenAccess W2095384123 @default.
- W2095384123 hasPrimaryLocation W20953841231 @default.
- W2095384123 hasRelatedWork W1962891513 @default.
- W2095384123 hasRelatedWork W1997782947 @default.
- W2095384123 hasRelatedWork W2027907136 @default.
- W2095384123 hasRelatedWork W2037329264 @default.
- W2095384123 hasRelatedWork W2050211404 @default.
- W2095384123 hasRelatedWork W2070321115 @default.
- W2095384123 hasRelatedWork W2072087823 @default.
- W2095384123 hasRelatedWork W2073774226 @default.
- W2095384123 hasRelatedWork W2085897297 @default.
- W2095384123 hasRelatedWork W2103371586 @default.
- W2095384123 hasRelatedWork W2116579225 @default.
- W2095384123 hasRelatedWork W2118026537 @default.
- W2095384123 hasRelatedWork W2133659860 @default.
- W2095384123 hasRelatedWork W2142036582 @default.
- W2095384123 hasRelatedWork W2147437977 @default.
- W2095384123 hasRelatedWork W2178710952 @default.
- W2095384123 hasRelatedWork W2465615694 @default.
- W2095384123 hasRelatedWork W2612278692 @default.
- W2095384123 hasRelatedWork W2613753578 @default.
- W2095384123 hasRelatedWork W3008665794 @default.
- W2095384123 isParatext "false" @default.
- W2095384123 isRetracted "false" @default.
- W2095384123 magId "2095384123" @default.
- W2095384123 workType "article" @default.