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- W2095429899 abstract "The frequency response characteristics of an angle-resolved optical scatterometer and a mechanical profilometer are examined. The transfer function for the scatterometer is found to be constant within the spatial frequency bandwidth of the system. The mechanical profilometer is found to have a nonlinear response. The effect of the nonlinearity on the frequency response of the mechanical profilometer is examined." @default.
- W2095429899 created "2016-06-24" @default.
- W2095429899 creator A5030533043 @default.
- W2095429899 creator A5053072285 @default.
- W2095429899 creator A5074362676 @default.
- W2095429899 date "1987-06-03" @default.
- W2095429899 modified "2023-10-05" @default.
- W2095429899 title "Frequency Response Characteristics Of An Optical Scatterometer And A Surface Profilometer" @default.
- W2095429899 doi "https://doi.org/10.1117/12.939477" @default.
- W2095429899 hasPublicationYear "1987" @default.
- W2095429899 type Work @default.
- W2095429899 sameAs 2095429899 @default.
- W2095429899 citedByCount "1" @default.
- W2095429899 crossrefType "proceedings-article" @default.
- W2095429899 hasAuthorship W2095429899A5030533043 @default.
- W2095429899 hasAuthorship W2095429899A5053072285 @default.
- W2095429899 hasAuthorship W2095429899A5074362676 @default.
- W2095429899 hasConcept C100921725 @default.
- W2095429899 hasConcept C119599485 @default.
- W2095429899 hasConcept C120665830 @default.
- W2095429899 hasConcept C121332964 @default.
- W2095429899 hasConcept C127313418 @default.
- W2095429899 hasConcept C127413603 @default.
- W2095429899 hasConcept C153294291 @default.
- W2095429899 hasConcept C158622935 @default.
- W2095429899 hasConcept C159985019 @default.
- W2095429899 hasConcept C161067210 @default.
- W2095429899 hasConcept C175231954 @default.
- W2095429899 hasConcept C192562407 @default.
- W2095429899 hasConcept C2776212561 @default.
- W2095429899 hasConcept C2776257435 @default.
- W2095429899 hasConcept C41008148 @default.
- W2095429899 hasConcept C62520636 @default.
- W2095429899 hasConcept C62649853 @default.
- W2095429899 hasConcept C71039073 @default.
- W2095429899 hasConcept C76155785 @default.
- W2095429899 hasConcept C79261456 @default.
- W2095429899 hasConcept C81299745 @default.
- W2095429899 hasConcept C8590192 @default.
- W2095429899 hasConceptScore W2095429899C100921725 @default.
- W2095429899 hasConceptScore W2095429899C119599485 @default.
- W2095429899 hasConceptScore W2095429899C120665830 @default.
- W2095429899 hasConceptScore W2095429899C121332964 @default.
- W2095429899 hasConceptScore W2095429899C127313418 @default.
- W2095429899 hasConceptScore W2095429899C127413603 @default.
- W2095429899 hasConceptScore W2095429899C153294291 @default.
- W2095429899 hasConceptScore W2095429899C158622935 @default.
- W2095429899 hasConceptScore W2095429899C159985019 @default.
- W2095429899 hasConceptScore W2095429899C161067210 @default.
- W2095429899 hasConceptScore W2095429899C175231954 @default.
- W2095429899 hasConceptScore W2095429899C192562407 @default.
- W2095429899 hasConceptScore W2095429899C2776212561 @default.
- W2095429899 hasConceptScore W2095429899C2776257435 @default.
- W2095429899 hasConceptScore W2095429899C41008148 @default.
- W2095429899 hasConceptScore W2095429899C62520636 @default.
- W2095429899 hasConceptScore W2095429899C62649853 @default.
- W2095429899 hasConceptScore W2095429899C71039073 @default.
- W2095429899 hasConceptScore W2095429899C76155785 @default.
- W2095429899 hasConceptScore W2095429899C79261456 @default.
- W2095429899 hasConceptScore W2095429899C81299745 @default.
- W2095429899 hasConceptScore W2095429899C8590192 @default.
- W2095429899 hasLocation W20954298991 @default.
- W2095429899 hasOpenAccess W2095429899 @default.
- W2095429899 hasPrimaryLocation W20954298991 @default.
- W2095429899 hasRelatedWork W1966848192 @default.
- W2095429899 hasRelatedWork W1987437945 @default.
- W2095429899 hasRelatedWork W2026061493 @default.
- W2095429899 hasRelatedWork W2029633887 @default.
- W2095429899 hasRelatedWork W2033231731 @default.
- W2095429899 hasRelatedWork W2038653910 @default.
- W2095429899 hasRelatedWork W2069102469 @default.
- W2095429899 hasRelatedWork W2095429899 @default.
- W2095429899 hasRelatedWork W2113203616 @default.
- W2095429899 hasRelatedWork W2770254442 @default.
- W2095429899 isParatext "false" @default.
- W2095429899 isRetracted "false" @default.
- W2095429899 magId "2095429899" @default.
- W2095429899 workType "article" @default.