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• W2095500729 abstract "SnO2 thin film gas sensors were prepared by r.f. magnetron sputtering. It was shown that the gas-sensitive properties of SnO2 thin films are managed substantially by the conditions of preparation which determine the oxygen content in the films. Oxygen-deficient films were fabricated in two manners: (1) deposition in Ar atmosphere followed by annealing in an oxygen atmosphere and; (2) deposition in Ar/O2 mixture with a variable oxygen concentration. Both methods facilitated with the same success the fabrication of polycrystalline films having a high sensitivity to reducing gases. A quantitative model was developed in order to describe the sputtering process of thin metal oxide films. It has been shown how the stoichiometry of as-deposited films is managed by an oxygen concentration in a reactive chamber. The calculations performed could be matched with the experimental results." @default.
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• W2095500729 date "1999-04-25" @default.
• W2095500729 modified "2023-10-02" @default.
• W2095500729 title "Oxygen flow effect on gas sensitivity properties of tin oxide film prepared by r.f. sputtering" @default.
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• W2095500729 doi "https://doi.org/10.1016/s0925-4005(99)00022-2" @default.
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