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- W2095540552 abstract "We demonstrate that energy selective scanning electron microscopy can lead to substantial dopant contrast and resolution improvements (compared to standard SEM) when the energy selection is carried out based on Monte Carlo modelled secondary electron spectra in combination with detector transfer modelling." @default.
- W2095540552 created "2016-06-24" @default.
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- W2095540552 date "2010-08-01" @default.
- W2095540552 modified "2023-09-27" @default.
- W2095540552 title "Energy selective scanning electron microscopy to reduce the effect of contamination layers on scanning electron microscope dopant mapping" @default.
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- W2095540552 doi "https://doi.org/10.1016/j.ultramic.2010.04.008" @default.
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