Matches in SemOpenAlex for { <https://semopenalex.org/work/W2095576152> ?p ?o ?g. }
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92
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- W2095576152 endingPage "181" @default.
- W2095576152 startingPage "175" @default.
- W2095576152 abstract "Arsenic ions were implanted into CoSi2 thin layers and subsequently diffused into the underlying silicon substrate. Junctions in the range between 30 and 400 nm depth were obtained with a high dopant concentration (1019-1020 cm-3) at the silicide-silicon interface. Coherent Si-As precipitates were found at the silicide-silicon interface near the CoSi2 grain boundaries. The precipitate formation has been associated with the high tensile stress induced by the silicide layer on the surface silicon region and to its influence on the dopant solid solubility. The precipitate density decreases if the silicide thickness is reduced, i.e. if the tensile stress produced by a silicide layer gets lower. These precipitates are easily dissolved during high temperature annealing after the silicide layer removal. A new delineation technique based on TEM analysis of selectively etched samples has evidenced that the intersections of silicide grain boundaries with a silicon surface act as diffusion sources." @default.
- W2095576152 created "2016-06-24" @default.
- W2095576152 creator A5002742453 @default.
- W2095576152 creator A5015520189 @default.
- W2095576152 creator A5065475514 @default.
- W2095576152 date "1993-11-01" @default.
- W2095576152 modified "2023-09-25" @default.
- W2095576152 title "Diffusion and precipitation of As from a CoSi2 diffusion source" @default.
- W2095576152 cites W1966211079 @default.
- W2095576152 cites W1970518523 @default.
- W2095576152 cites W1977349176 @default.
- W2095576152 cites W2004822714 @default.
- W2095576152 cites W2011447437 @default.
- W2095576152 cites W2016523083 @default.
- W2095576152 cites W2018102200 @default.
- W2095576152 cites W2024172140 @default.
- W2095576152 cites W2033341394 @default.
- W2095576152 cites W2051021955 @default.
- W2095576152 cites W2052683026 @default.
- W2095576152 cites W2062443007 @default.
- W2095576152 cites W2082387458 @default.
- W2095576152 cites W2087910773 @default.
- W2095576152 cites W2131312921 @default.
- W2095576152 doi "https://doi.org/10.1016/0169-4332(93)90163-6" @default.
- W2095576152 hasPublicationYear "1993" @default.
- W2095576152 type Work @default.
- W2095576152 sameAs 2095576152 @default.
- W2095576152 citedByCount "8" @default.
- W2095576152 crossrefType "journal-article" @default.
- W2095576152 hasAuthorship W2095576152A5002742453 @default.
- W2095576152 hasAuthorship W2095576152A5015520189 @default.
- W2095576152 hasAuthorship W2095576152A5065475514 @default.
- W2095576152 hasConcept C107054158 @default.
- W2095576152 hasConcept C113196181 @default.
- W2095576152 hasConcept C121332964 @default.
- W2095576152 hasConcept C127413603 @default.
- W2095576152 hasConcept C153294291 @default.
- W2095576152 hasConcept C185592680 @default.
- W2095576152 hasConcept C191897082 @default.
- W2095576152 hasConcept C191952053 @default.
- W2095576152 hasConcept C192562407 @default.
- W2095576152 hasConcept C2777855556 @default.
- W2095576152 hasConcept C2780901251 @default.
- W2095576152 hasConcept C42360764 @default.
- W2095576152 hasConcept C43617362 @default.
- W2095576152 hasConcept C47908070 @default.
- W2095576152 hasConcept C49040817 @default.
- W2095576152 hasConcept C544956773 @default.
- W2095576152 hasConcept C57863236 @default.
- W2095576152 hasConcept C69357855 @default.
- W2095576152 hasConcept C87976508 @default.
- W2095576152 hasConcept C97355855 @default.
- W2095576152 hasConceptScore W2095576152C107054158 @default.
- W2095576152 hasConceptScore W2095576152C113196181 @default.
- W2095576152 hasConceptScore W2095576152C121332964 @default.
- W2095576152 hasConceptScore W2095576152C127413603 @default.
- W2095576152 hasConceptScore W2095576152C153294291 @default.
- W2095576152 hasConceptScore W2095576152C185592680 @default.
- W2095576152 hasConceptScore W2095576152C191897082 @default.
- W2095576152 hasConceptScore W2095576152C191952053 @default.
- W2095576152 hasConceptScore W2095576152C192562407 @default.
- W2095576152 hasConceptScore W2095576152C2777855556 @default.
- W2095576152 hasConceptScore W2095576152C2780901251 @default.
- W2095576152 hasConceptScore W2095576152C42360764 @default.
- W2095576152 hasConceptScore W2095576152C43617362 @default.
- W2095576152 hasConceptScore W2095576152C47908070 @default.
- W2095576152 hasConceptScore W2095576152C49040817 @default.
- W2095576152 hasConceptScore W2095576152C544956773 @default.
- W2095576152 hasConceptScore W2095576152C57863236 @default.
- W2095576152 hasConceptScore W2095576152C69357855 @default.
- W2095576152 hasConceptScore W2095576152C87976508 @default.
- W2095576152 hasConceptScore W2095576152C97355855 @default.
- W2095576152 hasLocation W20955761521 @default.
- W2095576152 hasOpenAccess W2095576152 @default.
- W2095576152 hasPrimaryLocation W20955761521 @default.
- W2095576152 hasRelatedWork W1536164958 @default.
- W2095576152 hasRelatedWork W1608234391 @default.
- W2095576152 hasRelatedWork W1965150531 @default.
- W2095576152 hasRelatedWork W2003175532 @default.
- W2095576152 hasRelatedWork W2033709060 @default.
- W2095576152 hasRelatedWork W2049212995 @default.
- W2095576152 hasRelatedWork W2049650749 @default.
- W2095576152 hasRelatedWork W2057932623 @default.
- W2095576152 hasRelatedWork W2083937472 @default.
- W2095576152 hasRelatedWork W2110123652 @default.
- W2095576152 hasVolume "73" @default.
- W2095576152 isParatext "false" @default.
- W2095576152 isRetracted "false" @default.
- W2095576152 magId "2095576152" @default.
- W2095576152 workType "article" @default.