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- W2095576310 abstract "A new synthesis pathway for 4- and 2-hydroxymethylcarbinol (4- and 2-HPMC) has made a new class of highly branched polymers readily available. The polymers, which are isomers of polyhydroxystyrene, show unexpected dissolution behavior in aqueous bases which differs from the solubility characteristics seen for the linear polymers obtained by free-radical polymerization. This behavior is traced back to the influence of the changing bond types in the co-polymerization series on the kinetic parameters. With respect to lithography, the absorption of the polymers is too high to make them attractive as DUV resist materials. Although their bond structure shows all bond types that also exist in novolaks, the HPMC polymers are found to be more PHS-like than novolak-like in their performance with DNQ sensitizers. However, they are compatible with DNQ/novolak resists, and can be used in resin blends with novolaks without phase separation." @default.
- W2095576310 created "2016-06-24" @default.
- W2095576310 creator A5013323925 @default.
- W2095576310 creator A5020726034 @default.
- W2095576310 creator A5030609261 @default.
- W2095576310 creator A5044378709 @default.
- W2095576310 creator A5057504034 @default.
- W2095576310 creator A5059044582 @default.
- W2095576310 date "1996-06-14" @default.
- W2095576310 modified "2023-09-23" @default.
- W2095576310 title "Synthesis and lithographic performance of highly branched polymers from hydroxyphenylmethylcarbinols" @default.
- W2095576310 doi "https://doi.org/10.1117/12.241817" @default.
- W2095576310 hasPublicationYear "1996" @default.
- W2095576310 type Work @default.
- W2095576310 sameAs 2095576310 @default.
- W2095576310 citedByCount "3" @default.
- W2095576310 crossrefType "proceedings-article" @default.
- W2095576310 hasAuthorship W2095576310A5013323925 @default.
- W2095576310 hasAuthorship W2095576310A5020726034 @default.
- W2095576310 hasAuthorship W2095576310A5030609261 @default.
- W2095576310 hasAuthorship W2095576310A5044378709 @default.
- W2095576310 hasAuthorship W2095576310A5057504034 @default.
- W2095576310 hasAuthorship W2095576310A5059044582 @default.
- W2095576310 hasConcept C125287762 @default.
- W2095576310 hasConcept C126348684 @default.
- W2095576310 hasConcept C127413603 @default.
- W2095576310 hasConcept C155574463 @default.
- W2095576310 hasConcept C159985019 @default.
- W2095576310 hasConcept C171250308 @default.
- W2095576310 hasConcept C178790620 @default.
- W2095576310 hasConcept C185592680 @default.
- W2095576310 hasConcept C188027245 @default.
- W2095576310 hasConcept C192562407 @default.
- W2095576310 hasConcept C204223013 @default.
- W2095576310 hasConcept C2779227376 @default.
- W2095576310 hasConcept C42360764 @default.
- W2095576310 hasConcept C44228677 @default.
- W2095576310 hasConcept C49040817 @default.
- W2095576310 hasConcept C521977710 @default.
- W2095576310 hasConcept C53524968 @default.
- W2095576310 hasConcept C88380143 @default.
- W2095576310 hasConceptScore W2095576310C125287762 @default.
- W2095576310 hasConceptScore W2095576310C126348684 @default.
- W2095576310 hasConceptScore W2095576310C127413603 @default.
- W2095576310 hasConceptScore W2095576310C155574463 @default.
- W2095576310 hasConceptScore W2095576310C159985019 @default.
- W2095576310 hasConceptScore W2095576310C171250308 @default.
- W2095576310 hasConceptScore W2095576310C178790620 @default.
- W2095576310 hasConceptScore W2095576310C185592680 @default.
- W2095576310 hasConceptScore W2095576310C188027245 @default.
- W2095576310 hasConceptScore W2095576310C192562407 @default.
- W2095576310 hasConceptScore W2095576310C204223013 @default.
- W2095576310 hasConceptScore W2095576310C2779227376 @default.
- W2095576310 hasConceptScore W2095576310C42360764 @default.
- W2095576310 hasConceptScore W2095576310C44228677 @default.
- W2095576310 hasConceptScore W2095576310C49040817 @default.
- W2095576310 hasConceptScore W2095576310C521977710 @default.
- W2095576310 hasConceptScore W2095576310C53524968 @default.
- W2095576310 hasConceptScore W2095576310C88380143 @default.
- W2095576310 hasLocation W20955763101 @default.
- W2095576310 hasOpenAccess W2095576310 @default.
- W2095576310 hasPrimaryLocation W20955763101 @default.
- W2095576310 hasRelatedWork W1569278359 @default.
- W2095576310 hasRelatedWork W178758932 @default.
- W2095576310 hasRelatedWork W1982452378 @default.
- W2095576310 hasRelatedWork W1995085894 @default.
- W2095576310 hasRelatedWork W2034250236 @default.
- W2095576310 hasRelatedWork W2076125711 @default.
- W2095576310 hasRelatedWork W2092760259 @default.
- W2095576310 hasRelatedWork W2135899712 @default.
- W2095576310 hasRelatedWork W2488412051 @default.
- W2095576310 hasRelatedWork W4236029899 @default.
- W2095576310 isParatext "false" @default.
- W2095576310 isRetracted "false" @default.
- W2095576310 magId "2095576310" @default.
- W2095576310 workType "article" @default.