Matches in SemOpenAlex for { <https://semopenalex.org/work/W2095584442> ?p ?o ?g. }
Showing items 1 to 70 of
70
with 100 items per page.
- W2095584442 endingPage "135" @default.
- W2095584442 startingPage "132" @default.
- W2095584442 abstract "We present a new approach to determine the site incorporation of p-type impurities in the doped layers of microelectronic device structures based on X-ray standing wave (XSW) technique. Activation behavior of Zn in InP epitaxial layers grown by metal organic vapor phase epitaxy (MOVPE) on InP(1 0 0) substrates has been studied. The XSW experiments were performed at the A2 beamline of the Cornell high-energy synchrotron source (CHESS). Angular dependences of the Zn–K fluorescence intensity excited by the XSW field inside the InP layer for symmetrical (4 0 0) reflection have been measured along with the Indium L-edge and phosphorus K-edge fluorescence and X-ray reflectivity. Analysis of the XSW data based on the dynamical diffraction theory in layered crystal structures allowed us to determine the fractions of both Zn atoms incorporated into crystal lattice and interstitial Zn. In our example, a 1 μm thick MOCVD-grown InP layer with the nominal concentration of Zn atoms of (2.4 ± 0.2) × 1018 cm−3 has the fraction of the substitutional Zn of (65 ± 5)%. This result is in a good agreement with electrical activation of Zn measured with a combination of SIMS and CV profilometry. The accurate knowledge of the interstitial-to-substitutional ratio as a function of growth conditions is required to optimize electrical activation of Zn and to control its diffusion in the device structures." @default.
- W2095584442 created "2016-06-24" @default.
- W2095584442 creator A5034228471 @default.
- W2095584442 creator A5066679676 @default.
- W2095584442 creator A5075317216 @default.
- W2095584442 date "2005-04-01" @default.
- W2095584442 modified "2023-09-24" @default.
- W2095584442 title "Application of X-ray standing wave (XSW) technique for studies of Zn incorporation in InP epilayers" @default.
- W2095584442 cites W1995094652 @default.
- W2095584442 cites W1997155976 @default.
- W2095584442 cites W2029885191 @default.
- W2095584442 cites W2039549470 @default.
- W2095584442 cites W2057045165 @default.
- W2095584442 cites W2089384758 @default.
- W2095584442 cites W2095846814 @default.
- W2095584442 cites W2097010598 @default.
- W2095584442 doi "https://doi.org/10.1016/j.commatsci.2004.12.028" @default.
- W2095584442 hasPublicationYear "2005" @default.
- W2095584442 type Work @default.
- W2095584442 sameAs 2095584442 @default.
- W2095584442 citedByCount "0" @default.
- W2095584442 crossrefType "journal-article" @default.
- W2095584442 hasAuthorship W2095584442A5034228471 @default.
- W2095584442 hasAuthorship W2095584442A5066679676 @default.
- W2095584442 hasAuthorship W2095584442A5075317216 @default.
- W2095584442 hasConcept C110738630 @default.
- W2095584442 hasConcept C113196181 @default.
- W2095584442 hasConcept C171250308 @default.
- W2095584442 hasConcept C175665537 @default.
- W2095584442 hasConcept C185592680 @default.
- W2095584442 hasConcept C191897082 @default.
- W2095584442 hasConcept C192562407 @default.
- W2095584442 hasConcept C2779227376 @default.
- W2095584442 hasConcept C43617362 @default.
- W2095584442 hasConcept C49040817 @default.
- W2095584442 hasConcept C543292547 @default.
- W2095584442 hasConcept C550372918 @default.
- W2095584442 hasConceptScore W2095584442C110738630 @default.
- W2095584442 hasConceptScore W2095584442C113196181 @default.
- W2095584442 hasConceptScore W2095584442C171250308 @default.
- W2095584442 hasConceptScore W2095584442C175665537 @default.
- W2095584442 hasConceptScore W2095584442C185592680 @default.
- W2095584442 hasConceptScore W2095584442C191897082 @default.
- W2095584442 hasConceptScore W2095584442C192562407 @default.
- W2095584442 hasConceptScore W2095584442C2779227376 @default.
- W2095584442 hasConceptScore W2095584442C43617362 @default.
- W2095584442 hasConceptScore W2095584442C49040817 @default.
- W2095584442 hasConceptScore W2095584442C543292547 @default.
- W2095584442 hasConceptScore W2095584442C550372918 @default.
- W2095584442 hasIssue "1-3" @default.
- W2095584442 hasLocation W20955844421 @default.
- W2095584442 hasOpenAccess W2095584442 @default.
- W2095584442 hasPrimaryLocation W20955844421 @default.
- W2095584442 hasRelatedWork W100735765 @default.
- W2095584442 hasRelatedWork W1796677343 @default.
- W2095584442 hasRelatedWork W1997463678 @default.
- W2095584442 hasRelatedWork W2002384860 @default.
- W2095584442 hasRelatedWork W2057322937 @default.
- W2095584442 hasRelatedWork W2094664728 @default.
- W2095584442 hasRelatedWork W2499625984 @default.
- W2095584442 hasRelatedWork W2549803165 @default.
- W2095584442 hasRelatedWork W2955447263 @default.
- W2095584442 hasRelatedWork W4292731299 @default.
- W2095584442 hasVolume "33" @default.
- W2095584442 isParatext "false" @default.
- W2095584442 isRetracted "false" @default.
- W2095584442 magId "2095584442" @default.
- W2095584442 workType "article" @default.