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• W2095815466 endingPage "375" @default.
• W2095815466 startingPage "371" @default.
• W2095815466 abstract "Crystalline AlN thin films were deposited by laser ablation of high purity Al target in nitrogen reactive atmosphere. An YAG laser (λ=1.06 μm, tFWHM=10 ns, 0.3 J/pulse), was used as laser source. The material was collected on (100) and (111) Si wafers, The target collector distance was varied in the range 3–6 cm, the nitrogen pressure was set in the range of 10−3–10−1 mbar, the collectors were heated at different temperatures between 20 and 350°C. The influence of the process parameters on the physical and piezoelectric properties of the deposited films was analyzed. X-ray diffraction studies revealed different crystalline orientation depending on deposition conditions: collectors temperature, position and orientation, reactive gas pressure, incident laser fluence. The profile of Al and N atoms inside the film were characterized by SIMS analysis. Small oxygen traces are present at collector–film interface. Depth profile X-ray photoelectron spectroscopy confirms the existence — in particular experimental conditions — of only Al–N bonds inside the film." @default.
• W2095815466 created "2016-06-24" @default.
• W2095815466 creator A5006413179 @default.
• W2095815466 creator A5058830907 @default.
• W2095815466 creator A5068113171 @default.
• W2095815466 creator A5068497151 @default.
• W2095815466 creator A5085113613 @default.
• W2095815466 date "1997-02-01" @default.
• W2095815466 modified "2023-09-24" @default.
• W2095815466 title "AlN thin films deposition by laser ablation of Al target in nitrogen reactive atmosphere" @default.
• W2095815466 cites W152712277 @default.
• W2095815466 cites W1968551004 @default.
• W2095815466 cites W1978819423 @default.
• W2095815466 cites W1988357484 @default.
• W2095815466 cites W1989582124 @default.
• W2095815466 cites W1992960372 @default.
• W2095815466 cites W1997316729 @default.
• W2095815466 cites W2004817751 @default.
• W2095815466 cites W2011579060 @default.
• W2095815466 cites W2040325981 @default.
• W2095815466 cites W2043322854 @default.
• W2095815466 cites W2062569777 @default.
• W2095815466 cites W2081420011 @default.
• W2095815466 cites W2094808218 @default.
• W2095815466 cites W2099312724 @default.
• W2095815466 cites W2142023360 @default.
• W2095815466 cites W2155492185 @default.
• W2095815466 doi "https://doi.org/10.1016/s0169-4332(96)00751-9" @default.
• W2095815466 hasPublicationYear "1997" @default.
• W2095815466 type Work @default.
• W2095815466 sameAs 2095815466 @default.
• W2095815466 citedByCount "24" @default.
• W2095815466 countsByYear W20958154662013 @default.
• W2095815466 countsByYear W20958154662015 @default.
• W2095815466 countsByYear W20958154662020 @default.
• W2095815466 crossrefType "journal-article" @default.
• W2095815466 hasAuthorship W2095815466A5006413179 @default.
• W2095815466 hasAuthorship W2095815466A5058830907 @default.
• W2095815466 hasAuthorship W2095815466A5068113171 @default.
• W2095815466 hasAuthorship W2095815466A5068497151 @default.
• W2095815466 hasAuthorship W2095815466A5085113613 @default.
• W2095815466 hasConcept C113196181 @default.
• W2095815466 hasConcept C120665830 @default.
• W2095815466 hasConcept C121332964 @default.
• W2095815466 hasConcept C127413603 @default.
• W2095815466 hasConcept C151730666 @default.
• W2095815466 hasConcept C160671074 @default.
• W2095815466 hasConcept C171250308 @default.
• W2095815466 hasConcept C175708663 @default.
• W2095815466 hasConcept C178790620 @default.
• W2095815466 hasConcept C185592680 @default.
• W2095815466 hasConcept C19067145 @default.
• W2095815466 hasConcept C192562407 @default.
• W2095815466 hasConcept C207114421 @default.
• W2095815466 hasConcept C22078206 @default.
• W2095815466 hasConcept C2779188808 @default.
• W2095815466 hasConcept C2816523 @default.
• W2095815466 hasConcept C37982897 @default.
• W2095815466 hasConcept C42360764 @default.
• W2095815466 hasConcept C43617362 @default.
• W2095815466 hasConcept C49040817 @default.
• W2095815466 hasConcept C520434653 @default.
• W2095815466 hasConcept C537208039 @default.
• W2095815466 hasConcept C64297162 @default.
• W2095815466 hasConcept C65440619 @default.
• W2095815466 hasConcept C86803240 @default.
• W2095815466 hasConcept C97355855 @default.
• W2095815466 hasConceptScore W2095815466C113196181 @default.
• W2095815466 hasConceptScore W2095815466C120665830 @default.
• W2095815466 hasConceptScore W2095815466C121332964 @default.
• W2095815466 hasConceptScore W2095815466C127413603 @default.
• W2095815466 hasConceptScore W2095815466C151730666 @default.
• W2095815466 hasConceptScore W2095815466C160671074 @default.
• W2095815466 hasConceptScore W2095815466C171250308 @default.
• W2095815466 hasConceptScore W2095815466C175708663 @default.
• W2095815466 hasConceptScore W2095815466C178790620 @default.
• W2095815466 hasConceptScore W2095815466C185592680 @default.
• W2095815466 hasConceptScore W2095815466C19067145 @default.
• W2095815466 hasConceptScore W2095815466C192562407 @default.
• W2095815466 hasConceptScore W2095815466C207114421 @default.
• W2095815466 hasConceptScore W2095815466C22078206 @default.
• W2095815466 hasConceptScore W2095815466C2779188808 @default.
• W2095815466 hasConceptScore W2095815466C2816523 @default.
• W2095815466 hasConceptScore W2095815466C37982897 @default.
• W2095815466 hasConceptScore W2095815466C42360764 @default.
• W2095815466 hasConceptScore W2095815466C43617362 @default.
• W2095815466 hasConceptScore W2095815466C49040817 @default.
• W2095815466 hasConceptScore W2095815466C520434653 @default.
• W2095815466 hasConceptScore W2095815466C537208039 @default.
• W2095815466 hasConceptScore W2095815466C64297162 @default.
• W2095815466 hasConceptScore W2095815466C65440619 @default.
• W2095815466 hasConceptScore W2095815466C86803240 @default.
• W2095815466 hasConceptScore W2095815466C97355855 @default.
• W2095815466 hasLocation W20958154661 @default.
• W2095815466 hasOpenAccess W2095815466 @default.
• W2095815466 hasPrimaryLocation W20958154661 @default.
• W2095815466 hasRelatedWork W1981283385 @default.
• W2095815466 hasRelatedWork W2002988638 @default.

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