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- W2095914780 abstract "This paper reports on a novel MEMS electrical phase inverter resonator filter driving using differential DC bias. The internal electrical phase inverter mechanism is demonstrated by a clamped-clamped (CC) beam resonator and wire coupled free-free (FF) beam resonator arrays with in-phase or differential DC-bias. The filter performance is then demonstrated by an anchor coupled double-ended tuning fork (DETF) resonator and is realized in a silicon microfabrication process. The filter bandwidth is voltage tunable employing the electrical spring softening effect and the minimum tunable bandwidth is set by the energy coupling between neighbouring modes." @default.
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- W2095914780 date "2008-01-01" @default.
- W2095914780 modified "2023-09-23" @default.
- W2095914780 title "Internal electrical phase inversion for FF-beam resonator arrays and tuning fork filters" @default.
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- W2095914780 doi "https://doi.org/10.1109/memsys.2008.4443834" @default.
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