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- W2096036875 endingPage "256" @default.
- W2096036875 startingPage "249" @default.
- W2096036875 abstract "Rapid thermal annealing which involves fast heating and cooling rates, is used to activate dopants in thin-film structures yet minimize the dopant diffusion that occurs with excessive thermal exposure. Although the proper resulting electrical properties are the main concern, the structural behavior must also be considered. At the elevated annealing temperature, the heterostructure may be susceptible to both relaxation and yielding. However, the relative effect of these deformations is a function of the material properties, ramp-rate, annealing conditions, and wafer geometry, In particular, for a high-melting-point film on a lower-melting-point substrate, the substrate will experience the inelastic effects prior to the film. More specifically, because germanium has a significantly lower melting point than silicon, previously developed processing technology for silicon cannot be applied directly to germanium processing. A numerical model has been developed to account for the thermo-mechanical effects associated with rapid thermal annealing of relaxing materials. Numerical parametric studies have been conducted for rapid thermal annealing of a thin polysilicon film on a (111) germanium substrate in order to determine the optimum processing window. Results reveal that lower annealing temperatures that still fall within the RTA regime will minimize or even eliminate the plastic damage that could occur during thermal processing." @default.
- W2096036875 created "2016-06-24" @default.
- W2096036875 creator A5017060479 @default.
- W2096036875 creator A5047882545 @default.
- W2096036875 creator A5073078297 @default.
- W2096036875 date "1996-05-01" @default.
- W2096036875 modified "2023-10-16" @default.
- W2096036875 title "Rapid thermal annealing of high-melting-point films on low-melting-point substrates" @default.
- W2096036875 cites W1524316427 @default.
- W2096036875 cites W1535553858 @default.
- W2096036875 cites W1539875439 @default.
- W2096036875 cites W1713982583 @default.
- W2096036875 cites W1796851051 @default.
- W2096036875 cites W1968990574 @default.
- W2096036875 cites W1972796840 @default.
- W2096036875 cites W2001289501 @default.
- W2096036875 cites W2014046110 @default.
- W2096036875 cites W2023802982 @default.
- W2096036875 cites W2028015831 @default.
- W2096036875 cites W2030914775 @default.
- W2096036875 cites W2035346756 @default.
- W2096036875 cites W2056252466 @default.
- W2096036875 cites W2060922806 @default.
- W2096036875 cites W2061278135 @default.
- W2096036875 cites W2085170091 @default.
- W2096036875 cites W2094625800 @default.
- W2096036875 cites W2113035836 @default.
- W2096036875 cites W2132645621 @default.
- W2096036875 cites W2133298645 @default.
- W2096036875 cites W2152910183 @default.
- W2096036875 cites W2163227670 @default.
- W2096036875 cites W2319656818 @default.
- W2096036875 cites W3195059881 @default.
- W2096036875 cites W2020679464 @default.
- W2096036875 doi "https://doi.org/10.1109/66.492819" @default.
- W2096036875 hasPublicationYear "1996" @default.
- W2096036875 type Work @default.
- W2096036875 sameAs 2096036875 @default.
- W2096036875 citedByCount "1" @default.
- W2096036875 crossrefType "journal-article" @default.
- W2096036875 hasAuthorship W2096036875A5017060479 @default.
- W2096036875 hasAuthorship W2096036875A5047882545 @default.
- W2096036875 hasAuthorship W2096036875A5073078297 @default.
- W2096036875 hasConcept C121332964 @default.
- W2096036875 hasConcept C13530604 @default.
- W2096036875 hasConcept C159985019 @default.
- W2096036875 hasConcept C160671074 @default.
- W2096036875 hasConcept C191952053 @default.
- W2096036875 hasConcept C192562407 @default.
- W2096036875 hasConcept C204530211 @default.
- W2096036875 hasConcept C2777855556 @default.
- W2096036875 hasConcept C2780081452 @default.
- W2096036875 hasConcept C49040817 @default.
- W2096036875 hasConcept C544956773 @default.
- W2096036875 hasConcept C550623735 @default.
- W2096036875 hasConcept C57863236 @default.
- W2096036875 hasConcept C72832162 @default.
- W2096036875 hasConcept C79794668 @default.
- W2096036875 hasConcept C97355855 @default.
- W2096036875 hasConceptScore W2096036875C121332964 @default.
- W2096036875 hasConceptScore W2096036875C13530604 @default.
- W2096036875 hasConceptScore W2096036875C159985019 @default.
- W2096036875 hasConceptScore W2096036875C160671074 @default.
- W2096036875 hasConceptScore W2096036875C191952053 @default.
- W2096036875 hasConceptScore W2096036875C192562407 @default.
- W2096036875 hasConceptScore W2096036875C204530211 @default.
- W2096036875 hasConceptScore W2096036875C2777855556 @default.
- W2096036875 hasConceptScore W2096036875C2780081452 @default.
- W2096036875 hasConceptScore W2096036875C49040817 @default.
- W2096036875 hasConceptScore W2096036875C544956773 @default.
- W2096036875 hasConceptScore W2096036875C550623735 @default.
- W2096036875 hasConceptScore W2096036875C57863236 @default.
- W2096036875 hasConceptScore W2096036875C72832162 @default.
- W2096036875 hasConceptScore W2096036875C79794668 @default.
- W2096036875 hasConceptScore W2096036875C97355855 @default.
- W2096036875 hasIssue "2" @default.
- W2096036875 hasLocation W20960368751 @default.
- W2096036875 hasOpenAccess W2096036875 @default.
- W2096036875 hasPrimaryLocation W20960368751 @default.
- W2096036875 hasRelatedWork W1597872613 @default.
- W2096036875 hasRelatedWork W1629195660 @default.
- W2096036875 hasRelatedWork W1966988375 @default.
- W2096036875 hasRelatedWork W2007041767 @default.
- W2096036875 hasRelatedWork W2017419909 @default.
- W2096036875 hasRelatedWork W2028232532 @default.
- W2096036875 hasRelatedWork W2133416474 @default.
- W2096036875 hasRelatedWork W2162681036 @default.
- W2096036875 hasRelatedWork W2517226503 @default.
- W2096036875 hasRelatedWork W3191286252 @default.
- W2096036875 hasVolume "9" @default.
- W2096036875 isParatext "false" @default.
- W2096036875 isRetracted "false" @default.
- W2096036875 magId "2096036875" @default.
- W2096036875 workType "article" @default.