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- W2096056797 abstract "This paper presents the design, fabrication method and experimental results of electrothermal bimorph-actuated micromirror arrays with tip-tilt-piston capability, hidden actuators, and 88% area fill factor." @default.
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- W2096056797 date "2009-01-01" @default.
- W2096056797 modified "2023-09-23" @default.
- W2096056797 title "High-fill-factor, tip-tilt-piston micromirror array with hidden bimorph actuators and surface mounting capability" @default.
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- W2096056797 doi "https://doi.org/10.1109/omems.2009.5338594" @default.
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