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- W2096317584 abstract "A novel capacitive accelerometer using SDB-SOI(Si1icon Direct Bonding - Silicon On Insulator) structure has been proposed. The mass and beams of the accelerometer were fabricated with single crystal silicon layer in the thickness of lop m. The beam was formed in Swastika (e) shape to obtain longest beam in minimum area. The fabrication process was simplified by utilization of SO1 structure. Seven kinds of accelerometers for different measurement ranges were integrated in the same chip. The capacitance changes of the accelerometers were detected by capacitance to voltage converter IC(TI28882D), and the output characteristics were evaluated." @default.
- W2096317584 created "2016-06-24" @default.
- W2096317584 creator A5000723708 @default.
- W2096317584 creator A5010312576 @default.
- W2096317584 creator A5018951868 @default.
- W2096317584 creator A5040996968 @default.
- W2096317584 creator A5080883327 @default.
- W2096317584 date "2005-08-25" @default.
- W2096317584 modified "2023-09-28" @default.
- W2096317584 title "A Capacitive Accelerometer Using Sdb-soi Structure" @default.
- W2096317584 cites W2038064344 @default.
- W2096317584 cites W2074543769 @default.
- W2096317584 cites W2132190766 @default.
- W2096317584 cites W2139976966 @default.
- W2096317584 doi "https://doi.org/10.1109/sensor.1995.721890" @default.
- W2096317584 hasPublicationYear "2005" @default.
- W2096317584 type Work @default.
- W2096317584 sameAs 2096317584 @default.
- W2096317584 citedByCount "5" @default.
- W2096317584 countsByYear W20963175842012 @default.
- W2096317584 crossrefType "proceedings-article" @default.
- W2096317584 hasAuthorship W2096317584A5000723708 @default.
- W2096317584 hasAuthorship W2096317584A5010312576 @default.
- W2096317584 hasAuthorship W2096317584A5018951868 @default.
- W2096317584 hasAuthorship W2096317584A5040996968 @default.
- W2096317584 hasAuthorship W2096317584A5080883327 @default.
- W2096317584 hasConcept C111919701 @default.
- W2096317584 hasConcept C119599485 @default.
- W2096317584 hasConcept C120665830 @default.
- W2096317584 hasConcept C121332964 @default.
- W2096317584 hasConcept C127413603 @default.
- W2096317584 hasConcept C136525101 @default.
- W2096317584 hasConcept C142724271 @default.
- W2096317584 hasConcept C165801399 @default.
- W2096317584 hasConcept C168834538 @default.
- W2096317584 hasConcept C17525397 @default.
- W2096317584 hasConcept C192562407 @default.
- W2096317584 hasConcept C204787440 @default.
- W2096317584 hasConcept C206755178 @default.
- W2096317584 hasConcept C24326235 @default.
- W2096317584 hasConcept C30066665 @default.
- W2096317584 hasConcept C41008148 @default.
- W2096317584 hasConcept C49040817 @default.
- W2096317584 hasConcept C53143962 @default.
- W2096317584 hasConcept C544956773 @default.
- W2096317584 hasConcept C62520636 @default.
- W2096317584 hasConcept C71924100 @default.
- W2096317584 hasConcept C89805583 @default.
- W2096317584 hasConceptScore W2096317584C111919701 @default.
- W2096317584 hasConceptScore W2096317584C119599485 @default.
- W2096317584 hasConceptScore W2096317584C120665830 @default.
- W2096317584 hasConceptScore W2096317584C121332964 @default.
- W2096317584 hasConceptScore W2096317584C127413603 @default.
- W2096317584 hasConceptScore W2096317584C136525101 @default.
- W2096317584 hasConceptScore W2096317584C142724271 @default.
- W2096317584 hasConceptScore W2096317584C165801399 @default.
- W2096317584 hasConceptScore W2096317584C168834538 @default.
- W2096317584 hasConceptScore W2096317584C17525397 @default.
- W2096317584 hasConceptScore W2096317584C192562407 @default.
- W2096317584 hasConceptScore W2096317584C204787440 @default.
- W2096317584 hasConceptScore W2096317584C206755178 @default.
- W2096317584 hasConceptScore W2096317584C24326235 @default.
- W2096317584 hasConceptScore W2096317584C30066665 @default.
- W2096317584 hasConceptScore W2096317584C41008148 @default.
- W2096317584 hasConceptScore W2096317584C49040817 @default.
- W2096317584 hasConceptScore W2096317584C53143962 @default.
- W2096317584 hasConceptScore W2096317584C544956773 @default.
- W2096317584 hasConceptScore W2096317584C62520636 @default.
- W2096317584 hasConceptScore W2096317584C71924100 @default.
- W2096317584 hasConceptScore W2096317584C89805583 @default.
- W2096317584 hasLocation W20963175841 @default.
- W2096317584 hasOpenAccess W2096317584 @default.
- W2096317584 hasPrimaryLocation W20963175841 @default.
- W2096317584 hasRelatedWork W1489673410 @default.
- W2096317584 hasRelatedWork W1630602315 @default.
- W2096317584 hasRelatedWork W1963907167 @default.
- W2096317584 hasRelatedWork W1991073300 @default.
- W2096317584 hasRelatedWork W1992004554 @default.
- W2096317584 hasRelatedWork W1993381274 @default.
- W2096317584 hasRelatedWork W1993655752 @default.
- W2096317584 hasRelatedWork W2019768195 @default.
- W2096317584 hasRelatedWork W2023342020 @default.
- W2096317584 hasRelatedWork W2024086170 @default.
- W2096317584 hasRelatedWork W2031588405 @default.
- W2096317584 hasRelatedWork W2092492452 @default.
- W2096317584 hasRelatedWork W2125443191 @default.
- W2096317584 hasRelatedWork W2142291705 @default.
- W2096317584 hasRelatedWork W2147705630 @default.
- W2096317584 hasRelatedWork W2167055189 @default.
- W2096317584 hasRelatedWork W2243094698 @default.
- W2096317584 hasRelatedWork W2948851209 @default.
- W2096317584 hasRelatedWork W3021702439 @default.
- W2096317584 hasRelatedWork W2119888356 @default.
- W2096317584 isParatext "false" @default.
- W2096317584 isRetracted "false" @default.
- W2096317584 magId "2096317584" @default.
- W2096317584 workType "article" @default.