Matches in SemOpenAlex for { <https://semopenalex.org/work/W2096510909> ?p ?o ?g. }
Showing items 1 to 87 of
87
with 100 items per page.
- W2096510909 endingPage "2493" @default.
- W2096510909 startingPage "2490" @default.
- W2096510909 abstract "Abstract The damage to the solid by low-energy single atomic projectiles and high-energy cluster ion beams is analyzed by evaluating the Si (0 0 1) surface after ion sputtering, with angle-resolved x-ray photoelectron spectroscopy (ARXPS), high-resolution transmission electron microscopy (HRTEM), and atomic force microscopy (AFM). The depth distribution of Ar and C was determined using ARXPS. It was found that the primary ion implant region thickness in the Si is estimated to be 2.34, 1.68, and 1.63 nm for Ar + , C 60 + , and mixed Ar + –C 60 + sputtering, respectively. Similarly, 5–8, 4–6, and 3–5 nm thick rearranged layers were observed directly with HRTEM. The results indicate that cluster ion beams cause shallower damage to the solid. On the other hand, AFM revealed 0.44, 2.58, and 2.63 nm surface roughness indicating that cluster ion beams induce significantly rougher interfaces. This interfacial roughening will ultimately determine the depth resolution of the depth profile." @default.
- W2096510909 created "2016-06-24" @default.
- W2096510909 creator A5022380031 @default.
- W2096510909 creator A5032628101 @default.
- W2096510909 creator A5033409912 @default.
- W2096510909 creator A5038566073 @default.
- W2096510909 creator A5045294521 @default.
- W2096510909 creator A5045594996 @default.
- W2096510909 date "2008-12-01" @default.
- W2096510909 modified "2023-10-18" @default.
- W2096510909 title "Sputter damage in Si (001) surface by combination of C60+ and Ar+ ion beams" @default.
- W2096510909 cites W1969159563 @default.
- W2096510909 cites W1976984738 @default.
- W2096510909 cites W1977461596 @default.
- W2096510909 cites W1987990382 @default.
- W2096510909 cites W2004140885 @default.
- W2096510909 cites W2021005175 @default.
- W2096510909 cites W2028266097 @default.
- W2096510909 cites W2034446418 @default.
- W2096510909 cites W2038169501 @default.
- W2096510909 cites W2039915814 @default.
- W2096510909 cites W2059334284 @default.
- W2096510909 cites W2059480008 @default.
- W2096510909 cites W2075875601 @default.
- W2096510909 cites W2101837223 @default.
- W2096510909 cites W2136058206 @default.
- W2096510909 doi "https://doi.org/10.1016/j.apsusc.2008.07.132" @default.
- W2096510909 hasPublicationYear "2008" @default.
- W2096510909 type Work @default.
- W2096510909 sameAs 2096510909 @default.
- W2096510909 citedByCount "19" @default.
- W2096510909 countsByYear W20965109092012 @default.
- W2096510909 countsByYear W20965109092013 @default.
- W2096510909 countsByYear W20965109092015 @default.
- W2096510909 countsByYear W20965109092017 @default.
- W2096510909 crossrefType "journal-article" @default.
- W2096510909 hasAuthorship W2096510909A5022380031 @default.
- W2096510909 hasAuthorship W2096510909A5032628101 @default.
- W2096510909 hasAuthorship W2096510909A5033409912 @default.
- W2096510909 hasAuthorship W2096510909A5038566073 @default.
- W2096510909 hasAuthorship W2096510909A5045294521 @default.
- W2096510909 hasAuthorship W2096510909A5045594996 @default.
- W2096510909 hasBestOaLocation W20965109092 @default.
- W2096510909 hasConcept C121332964 @default.
- W2096510909 hasConcept C145148216 @default.
- W2096510909 hasConcept C171250308 @default.
- W2096510909 hasConcept C178790620 @default.
- W2096510909 hasConcept C184779094 @default.
- W2096510909 hasConcept C185592680 @default.
- W2096510909 hasConcept C19067145 @default.
- W2096510909 hasConcept C192562407 @default.
- W2096510909 hasConcept C22423302 @default.
- W2096510909 hasConcept C49040817 @default.
- W2096510909 hasConcept C544956773 @default.
- W2096510909 hasConceptScore W2096510909C121332964 @default.
- W2096510909 hasConceptScore W2096510909C145148216 @default.
- W2096510909 hasConceptScore W2096510909C171250308 @default.
- W2096510909 hasConceptScore W2096510909C178790620 @default.
- W2096510909 hasConceptScore W2096510909C184779094 @default.
- W2096510909 hasConceptScore W2096510909C185592680 @default.
- W2096510909 hasConceptScore W2096510909C19067145 @default.
- W2096510909 hasConceptScore W2096510909C192562407 @default.
- W2096510909 hasConceptScore W2096510909C22423302 @default.
- W2096510909 hasConceptScore W2096510909C49040817 @default.
- W2096510909 hasConceptScore W2096510909C544956773 @default.
- W2096510909 hasIssue "5" @default.
- W2096510909 hasLocation W20965109091 @default.
- W2096510909 hasLocation W20965109092 @default.
- W2096510909 hasOpenAccess W2096510909 @default.
- W2096510909 hasPrimaryLocation W20965109091 @default.
- W2096510909 hasRelatedWork W1493680313 @default.
- W2096510909 hasRelatedWork W1975201462 @default.
- W2096510909 hasRelatedWork W1978200510 @default.
- W2096510909 hasRelatedWork W1987015944 @default.
- W2096510909 hasRelatedWork W2016736726 @default.
- W2096510909 hasRelatedWork W2032054711 @default.
- W2096510909 hasRelatedWork W2086708282 @default.
- W2096510909 hasRelatedWork W2112120612 @default.
- W2096510909 hasRelatedWork W2151358996 @default.
- W2096510909 hasRelatedWork W3210190643 @default.
- W2096510909 hasVolume "255" @default.
- W2096510909 isParatext "false" @default.
- W2096510909 isRetracted "false" @default.
- W2096510909 magId "2096510909" @default.
- W2096510909 workType "article" @default.