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- W2096840011 abstract "An X-Y stage for use principally in the semiconductor industry, for electron beam lithography tools and wafer steppers, is described. The stage features a moving puck which is supported by air bearings on a flat baseplate and is driven by on-board linear induction motors which thrust against the baseplate. The stage position is measured by laser interferometers and is controlled by a digital servo system which computes the drive to the linear motors in real time. The design and measured performance of the induction motors is described together with their 8 channel switch mode drive amplifier." @default.
- W2096840011 created "2016-06-24" @default.
- W2096840011 creator A5055728359 @default.
- W2096840011 creator A5069953162 @default.
- W2096840011 creator A5079308110 @default.
- W2096840011 date "1998-01-01" @default.
- W2096840011 modified "2023-10-18" @default.
- W2096840011 title "Precision X-Y positioning systems using linear induction motors" @default.
- W2096840011 doi "https://doi.org/10.1049/ic:19980931" @default.
- W2096840011 hasPublicationYear "1998" @default.
- W2096840011 type Work @default.
- W2096840011 sameAs 2096840011 @default.
- W2096840011 citedByCount "7" @default.
- W2096840011 countsByYear W20968400112014 @default.
- W2096840011 crossrefType "proceedings-article" @default.
- W2096840011 hasAuthorship W2096840011A5055728359 @default.
- W2096840011 hasAuthorship W2096840011A5069953162 @default.
- W2096840011 hasAuthorship W2096840011A5079308110 @default.
- W2096840011 hasConcept C119599485 @default.
- W2096840011 hasConcept C127413603 @default.
- W2096840011 hasConcept C133731056 @default.
- W2096840011 hasConcept C154945302 @default.
- W2096840011 hasConcept C165801399 @default.
- W2096840011 hasConcept C165948005 @default.
- W2096840011 hasConcept C2775924081 @default.
- W2096840011 hasConcept C41008148 @default.
- W2096840011 hasConcept C46150780 @default.
- W2096840011 hasConcept C47446073 @default.
- W2096840011 hasConcept C80962145 @default.
- W2096840011 hasConceptScore W2096840011C119599485 @default.
- W2096840011 hasConceptScore W2096840011C127413603 @default.
- W2096840011 hasConceptScore W2096840011C133731056 @default.
- W2096840011 hasConceptScore W2096840011C154945302 @default.
- W2096840011 hasConceptScore W2096840011C165801399 @default.
- W2096840011 hasConceptScore W2096840011C165948005 @default.
- W2096840011 hasConceptScore W2096840011C2775924081 @default.
- W2096840011 hasConceptScore W2096840011C41008148 @default.
- W2096840011 hasConceptScore W2096840011C46150780 @default.
- W2096840011 hasConceptScore W2096840011C47446073 @default.
- W2096840011 hasConceptScore W2096840011C80962145 @default.
- W2096840011 hasLocation W20968400111 @default.
- W2096840011 hasOpenAccess W2096840011 @default.
- W2096840011 hasPrimaryLocation W20968400111 @default.
- W2096840011 hasRelatedWork W1494092928 @default.
- W2096840011 hasRelatedWork W2009034230 @default.
- W2096840011 hasRelatedWork W2018532467 @default.
- W2096840011 hasRelatedWork W2039573311 @default.
- W2096840011 hasRelatedWork W2044185945 @default.
- W2096840011 hasRelatedWork W2073127022 @default.
- W2096840011 hasRelatedWork W2171965905 @default.
- W2096840011 hasRelatedWork W2372679636 @default.
- W2096840011 hasRelatedWork W2903501963 @default.
- W2096840011 hasRelatedWork W3093903205 @default.
- W2096840011 isParatext "false" @default.
- W2096840011 isRetracted "false" @default.
- W2096840011 magId "2096840011" @default.
- W2096840011 workType "article" @default.