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- W2097211595 abstract "SUMMARY Optically excited self-resonant microbeams form the basis for a new class of versatile, high-performance, lowcost fiber-optic sensors that uniquely combine silicon microfabrication technology with optoelectronic technology. The vibrating microbeam in its polysilicon vacuum enclosure is an effective optomechanical modulator driven by a built-in photodiode. Self-resonance with high modulation indices for reflected light has been demonstrated on devices having properly chosen microbeam and gap thicknesses. The microbeams are sensitive strain transducers with high gage factors, low temperature sensitivity, and wide dynamic range. They are the first optically powered active devices to achieve gain by interchanging optical, electrical, and mechanical energy in a merged structure." @default.
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- W2097211595 date "2005-08-25" @default.
- W2097211595 modified "2023-09-24" @default.
- W2097211595 title "Optically Excited Self-resonant Strain Transducers" @default.
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- W2097211595 doi "https://doi.org/10.1109/sensor.1995.721903" @default.
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