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- W2097268377 abstract "The combination of focused ion beam (FIB) milling and field emission scanning electron microscopy (SEM) with x-ray energy-dispersive spectroscopy (EDS) makes possible high-spatial-resolution (<1 μm) element-specific depth profiling. The depth profile resolution is controlled via the FIB to <5 nm sputter depths. Depth profiles through thin-film hard disk media on NiP substrates and through similar film structures deposited on a carbon-coated substrate are presented. The high spatial resolution of the FIB/SEM depth profile is not necessary for blanket films, and depth profiles through them are used to benchmark the spatial and depth resolution of the technique using a field emission SEM. Energy depth profiles that use increasing primary electron beam voltages in the spectrometer are shown on the same samples in comparison to FIB depth profiles. A brief overview of this technique in relation to XPS, AES and SIMS illustrates applications where FIB depth profiling analysis offers some advantages. Copyright © 1999 John Wiley & Sons, Ltd." @default.
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- W2097268377 date "1999-04-01" @default.
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- W2097268377 title "Chemical depth profiling on submicron regions: a combined focused ion beam/scanning electron microscope approach" @default.
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- W2097268377 doi "https://doi.org/10.1002/(sici)1096-9918(199904)27:4<199::aid-sia473>3.0.co;2-f" @default.
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