Matches in SemOpenAlex for { <https://semopenalex.org/work/W2097488645> ?p ?o ?g. }
Showing items 1 to 91 of
91
with 100 items per page.
- W2097488645 endingPage "4466" @default.
- W2097488645 startingPage "4464" @default.
- W2097488645 abstract "We have developed a fabrication technique for narrow NbC/sub x/N/sub 1-x//MgO/NbC/sub x/N/sub 1-x/ junctions on MgO substrates using chemical-mechanical polishing (CMP) for the removal of SiO/sub 2/ insulation layer from the top of junctions. Parameters of CMP have been optimized so that the run-to-run deviation of removal rate for SiO/sup 2/ is less than /spl plusmn/20% and uniformity across a 10 mm/spl times/10 mm area is better than /spl plusmn/20%. Using the optimized CMP, NbC/sub x/N/sub 1-x//MgO/NbC/sub x/N/sub 1-x/ junctions with width of 1-4 /spl mu/m have been successfully fabricated. Fabricated junctions showed no superconducting leakage current and critical current densities of interconnections between the counter electrode and the wiring were larger than 1/spl times/10/sup 8/ A/m/sup 2/. This CMP-based fabrication technique is applicable to SIS mixers and Josephson local oscillators operated near 1 THz." @default.
- W2097488645 created "2016-06-24" @default.
- W2097488645 creator A5028514182 @default.
- W2097488645 creator A5028740407 @default.
- W2097488645 creator A5029935378 @default.
- W2097488645 date "1999-06-01" @default.
- W2097488645 modified "2023-10-16" @default.
- W2097488645 title "Fabrication of niobium-carbonitride Josephson junctions on magnesium-oxide substrates using chemical-mechanical polishing" @default.
- W2097488645 cites W139353146 @default.
- W2097488645 cites W2007890340 @default.
- W2097488645 cites W2050385829 @default.
- W2097488645 cites W2053241105 @default.
- W2097488645 cites W2078948630 @default.
- W2097488645 cites W2099572314 @default.
- W2097488645 cites W2575831298 @default.
- W2097488645 doi "https://doi.org/10.1109/77.784016" @default.
- W2097488645 hasPublicationYear "1999" @default.
- W2097488645 type Work @default.
- W2097488645 sameAs 2097488645 @default.
- W2097488645 citedByCount "10" @default.
- W2097488645 crossrefType "journal-article" @default.
- W2097488645 hasAuthorship W2097488645A5028514182 @default.
- W2097488645 hasAuthorship W2097488645A5028740407 @default.
- W2097488645 hasAuthorship W2097488645A5029935378 @default.
- W2097488645 hasConcept C109613756 @default.
- W2097488645 hasConcept C113196181 @default.
- W2097488645 hasConcept C12038964 @default.
- W2097488645 hasConcept C121332964 @default.
- W2097488645 hasConcept C136525101 @default.
- W2097488645 hasConcept C138113353 @default.
- W2097488645 hasConcept C142724271 @default.
- W2097488645 hasConcept C159985019 @default.
- W2097488645 hasConcept C17525397 @default.
- W2097488645 hasConcept C180088628 @default.
- W2097488645 hasConcept C185592680 @default.
- W2097488645 hasConcept C191897082 @default.
- W2097488645 hasConcept C192562407 @default.
- W2097488645 hasConcept C204787440 @default.
- W2097488645 hasConcept C26873012 @default.
- W2097488645 hasConcept C2779851234 @default.
- W2097488645 hasConcept C2779942774 @default.
- W2097488645 hasConcept C43617362 @default.
- W2097488645 hasConcept C49040817 @default.
- W2097488645 hasConcept C507968137 @default.
- W2097488645 hasConcept C54101563 @default.
- W2097488645 hasConcept C62520636 @default.
- W2097488645 hasConcept C71924100 @default.
- W2097488645 hasConceptScore W2097488645C109613756 @default.
- W2097488645 hasConceptScore W2097488645C113196181 @default.
- W2097488645 hasConceptScore W2097488645C12038964 @default.
- W2097488645 hasConceptScore W2097488645C121332964 @default.
- W2097488645 hasConceptScore W2097488645C136525101 @default.
- W2097488645 hasConceptScore W2097488645C138113353 @default.
- W2097488645 hasConceptScore W2097488645C142724271 @default.
- W2097488645 hasConceptScore W2097488645C159985019 @default.
- W2097488645 hasConceptScore W2097488645C17525397 @default.
- W2097488645 hasConceptScore W2097488645C180088628 @default.
- W2097488645 hasConceptScore W2097488645C185592680 @default.
- W2097488645 hasConceptScore W2097488645C191897082 @default.
- W2097488645 hasConceptScore W2097488645C192562407 @default.
- W2097488645 hasConceptScore W2097488645C204787440 @default.
- W2097488645 hasConceptScore W2097488645C26873012 @default.
- W2097488645 hasConceptScore W2097488645C2779851234 @default.
- W2097488645 hasConceptScore W2097488645C2779942774 @default.
- W2097488645 hasConceptScore W2097488645C43617362 @default.
- W2097488645 hasConceptScore W2097488645C49040817 @default.
- W2097488645 hasConceptScore W2097488645C507968137 @default.
- W2097488645 hasConceptScore W2097488645C54101563 @default.
- W2097488645 hasConceptScore W2097488645C62520636 @default.
- W2097488645 hasConceptScore W2097488645C71924100 @default.
- W2097488645 hasIssue "2" @default.
- W2097488645 hasLocation W20974886451 @default.
- W2097488645 hasOpenAccess W2097488645 @default.
- W2097488645 hasPrimaryLocation W20974886451 @default.
- W2097488645 hasRelatedWork W1548264291 @default.
- W2097488645 hasRelatedWork W1601360707 @default.
- W2097488645 hasRelatedWork W2028813249 @default.
- W2097488645 hasRelatedWork W2043116351 @default.
- W2097488645 hasRelatedWork W2049122670 @default.
- W2097488645 hasRelatedWork W2097488645 @default.
- W2097488645 hasRelatedWork W2111896949 @default.
- W2097488645 hasRelatedWork W2287300551 @default.
- W2097488645 hasRelatedWork W2084542780 @default.
- W2097488645 hasRelatedWork W2120068653 @default.
- W2097488645 hasVolume "9" @default.
- W2097488645 isParatext "false" @default.
- W2097488645 isRetracted "false" @default.
- W2097488645 magId "2097488645" @default.
- W2097488645 workType "article" @default.