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- W2097613392 abstract "ADVERTISEMENT RETURN TO ISSUEPREVReviewNEXTSupercritical Fluids for the Fabrication of Semiconductor Devices: Emerging or Missed Opportunities?Alvin H. Romang and James J. Watkins*View Author Information Polymer Science and Engineering Department, University of Massachusetts−Amherst, Amherst, Massachusetts 01003* Corresponding author. E-mail: [email protected]Cite this: Chem. Rev. 2010, 110, 1, 459–478Publication Date (Web):December 17, 2009Publication History Received22 July 2009Published online17 December 2009Published inissue 13 January 2010https://doi.org/10.1021/cr900255wCopyright © 2009 American Chemical SocietyRIGHTS & PERMISSIONSArticle Views3509Altmetric-Citations96LEARN ABOUT THESE METRICSArticle Views are the COUNTER-compliant sum of full text article downloads since November 2008 (both PDF and HTML) across all institutions and individuals. These metrics are regularly updated to reflect usage leading up to the last few days.Citations are the number of other articles citing this article, calculated by Crossref and updated daily. Find more information about Crossref citation counts.The Altmetric Attention Score is a quantitative measure of the attention that a research article has received online. Clicking on the donut icon will load a page at altmetric.com with additional details about the score and the social media presence for the given article. Find more information on the Altmetric Attention Score and how the score is calculated. Share Add toView InAdd Full Text with ReferenceAdd Description ExportRISCitationCitation and abstractCitation and referencesMore Options Share onFacebookTwitterWechatLinked InReddit Read OnlinePDF (3 MB) Get e-AlertsSUBJECTS:Chemical vapor deposition,Deposition,Genetics,Oxides,Precursors Get e-Alerts" @default.
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- W2097613392 date "2009-12-17" @default.
- W2097613392 modified "2023-10-03" @default.
- W2097613392 title "Supercritical Fluids for the Fabrication of Semiconductor Devices: Emerging or Missed Opportunities?" @default.
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