Matches in SemOpenAlex for { <https://semopenalex.org/work/W2097626890> ?p ?o ?g. }
Showing items 1 to 76 of
76
with 100 items per page.
- W2097626890 abstract "A critical aspect of semiconductor manufacturing is the design and analysis of material handling and production control policies to optimize fab performance. This research utilizes two simulations of SEMATECH fab data of actual production fabs. The hypothesis of this study is that both vehicle and machine dispatching rules and their interaction have significant impact on fab performance. To test this hypothesis, a full factorial design experiment is performed. The vehicle and machine dispatching rules as well as their interaction are shown to have a significant impact" @default.
- W2097626890 created "2016-06-24" @default.
- W2097626890 creator A5079843857 @default.
- W2097626890 creator A5080949126 @default.
- W2097626890 creator A5084563184 @default.
- W2097626890 date "2005-01-01" @default.
- W2097626890 modified "2023-10-16" @default.
- W2097626890 title "Simulation analysis of dispatching rules for automated material handling systems and processing tools in semiconductor fabs" @default.
- W2097626890 cites W1901473272 @default.
- W2097626890 cites W2151717769 @default.
- W2097626890 cites W2165008631 @default.
- W2097626890 cites W4238169270 @default.
- W2097626890 doi "https://doi.org/10.1109/issm.2005.1513302" @default.
- W2097626890 hasPublicationYear "2005" @default.
- W2097626890 type Work @default.
- W2097626890 sameAs 2097626890 @default.
- W2097626890 citedByCount "9" @default.
- W2097626890 countsByYear W20976268902015 @default.
- W2097626890 countsByYear W20976268902020 @default.
- W2097626890 crossrefType "proceedings-article" @default.
- W2097626890 hasAuthorship W2097626890A5079843857 @default.
- W2097626890 hasAuthorship W2097626890A5080949126 @default.
- W2097626890 hasAuthorship W2097626890A5084563184 @default.
- W2097626890 hasBestOaLocation W20976268902 @default.
- W2097626890 hasConcept C117671659 @default.
- W2097626890 hasConcept C119599485 @default.
- W2097626890 hasConcept C119857082 @default.
- W2097626890 hasConcept C127413603 @default.
- W2097626890 hasConcept C13736549 @default.
- W2097626890 hasConcept C139719470 @default.
- W2097626890 hasConcept C160671074 @default.
- W2097626890 hasConcept C162324750 @default.
- W2097626890 hasConcept C169222746 @default.
- W2097626890 hasConcept C2776068756 @default.
- W2097626890 hasConcept C2778348673 @default.
- W2097626890 hasConcept C2780682718 @default.
- W2097626890 hasConcept C2983137510 @default.
- W2097626890 hasConcept C2987888538 @default.
- W2097626890 hasConcept C41008148 @default.
- W2097626890 hasConcept C66018809 @default.
- W2097626890 hasConcept C78519656 @default.
- W2097626890 hasConceptScore W2097626890C117671659 @default.
- W2097626890 hasConceptScore W2097626890C119599485 @default.
- W2097626890 hasConceptScore W2097626890C119857082 @default.
- W2097626890 hasConceptScore W2097626890C127413603 @default.
- W2097626890 hasConceptScore W2097626890C13736549 @default.
- W2097626890 hasConceptScore W2097626890C139719470 @default.
- W2097626890 hasConceptScore W2097626890C160671074 @default.
- W2097626890 hasConceptScore W2097626890C162324750 @default.
- W2097626890 hasConceptScore W2097626890C169222746 @default.
- W2097626890 hasConceptScore W2097626890C2776068756 @default.
- W2097626890 hasConceptScore W2097626890C2778348673 @default.
- W2097626890 hasConceptScore W2097626890C2780682718 @default.
- W2097626890 hasConceptScore W2097626890C2983137510 @default.
- W2097626890 hasConceptScore W2097626890C2987888538 @default.
- W2097626890 hasConceptScore W2097626890C41008148 @default.
- W2097626890 hasConceptScore W2097626890C66018809 @default.
- W2097626890 hasConceptScore W2097626890C78519656 @default.
- W2097626890 hasLocation W20976268901 @default.
- W2097626890 hasLocation W20976268902 @default.
- W2097626890 hasOpenAccess W2097626890 @default.
- W2097626890 hasPrimaryLocation W20976268901 @default.
- W2097626890 hasRelatedWork W1643531616 @default.
- W2097626890 hasRelatedWork W2055728441 @default.
- W2097626890 hasRelatedWork W2097626890 @default.
- W2097626890 hasRelatedWork W2118138832 @default.
- W2097626890 hasRelatedWork W2153949497 @default.
- W2097626890 hasRelatedWork W2184668380 @default.
- W2097626890 hasRelatedWork W2399146309 @default.
- W2097626890 hasRelatedWork W3095245488 @default.
- W2097626890 hasRelatedWork W4229039071 @default.
- W2097626890 hasRelatedWork W4365791519 @default.
- W2097626890 isParatext "false" @default.
- W2097626890 isRetracted "false" @default.
- W2097626890 magId "2097626890" @default.
- W2097626890 workType "article" @default.