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- W2097632089 abstract "The proposed CMOS-MEMS optical phase shifter activates λ/4 vertical displacement with 3V driving voltages and achieves the mirror deformation within λ/10. The fill factor is 90% without the need of flip-chip bonding technology." @default.
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- W2097632089 date "2009-01-01" @default.
- W2097632089 modified "2023-09-27" @default.
- W2097632089 title "CMOS-MEMS based optical phase shifter array with high fill factor" @default.
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- W2097632089 doi "https://doi.org/10.1109/omems.2009.5338578" @default.
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