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- W2097696263 abstract "A wet-chemistry treatment, consisting of a fresh mixture of one-to-one 2-propanol plus concentrated sulfuric acid added to photoresist developer, which is tetramethyl ammonium hydroxide, was found to reduce the dark-current density at the -5-V dc reverse-bias to 2 pA/μm <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sup> (2×10/sup -4/ A/cm <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sup> ), and simultaneously to maintain the lateral geometrical dimensions, of reactive ion etched, 3 micrometer tall, right-cylinder mesa, Ga/sub 0.47/In/sub 0.53/As p-i-n diode photodetectors with diameters of 100, 50, and 25 μm." @default.
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- W2097696263 date "1997-04-01" @default.
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- W2097696263 title "Wet-chemistry surface treatment for dark-current reduction that preserves lateral dimensions of reactive ion etched Ga/sub 0.47/In/sub 0.53/As p-i-n diode photodetectors" @default.
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- W2097696263 doi "https://doi.org/10.1109/68.559398" @default.
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