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- W2097754629 abstract "This article examines the special features of the III-V semiconductors, such as gallium arsenide and chemically related compounds, which make them an attractive alternative to silicon-based technology in the field of microelectromechanical systems. As in conventional electronic systems, it is not expected that the III-V compounds will become exclusively used in all instances, but rather a substantial niche market-exploiting the special advantages of the compound semiconductors-is likely to be established." @default.
- W2097754629 created "2016-06-24" @default.
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- W2097754629 date "1994-12-01" @default.
- W2097754629 modified "2023-09-24" @default.
- W2097754629 title "The impact of III-V semiconductors on microelectromechanical systems" @default.
- W2097754629 doi "https://doi.org/10.1049/esej:19940607" @default.
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