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- W2097775319 abstract "Center anchored polysilicon plates are parametrically excited with ultrasonic substrate motion. The substrate motion is generated by a PZT plate bonded to the silicon die. Parametric excitation is used to achieve large amplitude, over 100 nm, transverse plate vibrations in atmospheric pressure with sub-3 V/sub PP/ drive on the PZT plate. The parametrically excited modes are observed to be whispering gallery plate modes with no radial nodal points. The possible nonlinear mechanisms are analyzed and the parametric excitation is explained with in-plane plate stresses due to the lateral plate anchor motion. The effect of in-plane stresses is modeled with von Karman plate equations. Parametric instability is demonstrated with the use of the Floquet transition matrix." @default.
- W2097775319 created "2016-06-24" @default.
- W2097775319 creator A5014987755 @default.
- W2097775319 creator A5047533805 @default.
- W2097775319 date "2003-12-22" @default.
- W2097775319 modified "2023-09-27" @default.
- W2097775319 title "Parametric excitation of whispering gallery modes on circular micromachined polysilicon disks" @default.
- W2097775319 cites W1980169157 @default.
- W2097775319 cites W1980901886 @default.
- W2097775319 cites W2007837056 @default.
- W2097775319 cites W2020028342 @default.
- W2097775319 cites W2022168868 @default.
- W2097775319 cites W2024825114 @default.
- W2097775319 cites W2041152887 @default.
- W2097775319 cites W2085196014 @default.
- W2097775319 cites W2505866114 @default.
- W2097775319 doi "https://doi.org/10.1109/ultsym.2002.1192467" @default.
- W2097775319 hasPublicationYear "2003" @default.
- W2097775319 type Work @default.
- W2097775319 sameAs 2097775319 @default.
- W2097775319 citedByCount "0" @default.
- W2097775319 crossrefType "proceedings-article" @default.
- W2097775319 hasAuthorship W2097775319A5014987755 @default.
- W2097775319 hasAuthorship W2097775319A5047533805 @default.
- W2097775319 hasConcept C105795698 @default.
- W2097775319 hasConcept C117251300 @default.
- W2097775319 hasConcept C120665830 @default.
- W2097775319 hasConcept C121332964 @default.
- W2097775319 hasConcept C17825722 @default.
- W2097775319 hasConcept C181500209 @default.
- W2097775319 hasConcept C184779094 @default.
- W2097775319 hasConcept C192562407 @default.
- W2097775319 hasConcept C198394728 @default.
- W2097775319 hasConcept C24890656 @default.
- W2097775319 hasConcept C2524010 @default.
- W2097775319 hasConcept C33923547 @default.
- W2097775319 hasConcept C62520636 @default.
- W2097775319 hasConcept C77255779 @default.
- W2097775319 hasConcept C83581075 @default.
- W2097775319 hasConcept C97126364 @default.
- W2097775319 hasConceptScore W2097775319C105795698 @default.
- W2097775319 hasConceptScore W2097775319C117251300 @default.
- W2097775319 hasConceptScore W2097775319C120665830 @default.
- W2097775319 hasConceptScore W2097775319C121332964 @default.
- W2097775319 hasConceptScore W2097775319C17825722 @default.
- W2097775319 hasConceptScore W2097775319C181500209 @default.
- W2097775319 hasConceptScore W2097775319C184779094 @default.
- W2097775319 hasConceptScore W2097775319C192562407 @default.
- W2097775319 hasConceptScore W2097775319C198394728 @default.
- W2097775319 hasConceptScore W2097775319C24890656 @default.
- W2097775319 hasConceptScore W2097775319C2524010 @default.
- W2097775319 hasConceptScore W2097775319C33923547 @default.
- W2097775319 hasConceptScore W2097775319C62520636 @default.
- W2097775319 hasConceptScore W2097775319C77255779 @default.
- W2097775319 hasConceptScore W2097775319C83581075 @default.
- W2097775319 hasConceptScore W2097775319C97126364 @default.
- W2097775319 hasLocation W20977753191 @default.
- W2097775319 hasOpenAccess W2097775319 @default.
- W2097775319 hasPrimaryLocation W20977753191 @default.
- W2097775319 hasRelatedWork W1522771248 @default.
- W2097775319 hasRelatedWork W1970662053 @default.
- W2097775319 hasRelatedWork W2002181924 @default.
- W2097775319 hasRelatedWork W2003940159 @default.
- W2097775319 hasRelatedWork W2009635936 @default.
- W2097775319 hasRelatedWork W2021460656 @default.
- W2097775319 hasRelatedWork W2029112375 @default.
- W2097775319 hasRelatedWork W2059585848 @default.
- W2097775319 hasRelatedWork W2100107412 @default.
- W2097775319 hasRelatedWork W2102880085 @default.
- W2097775319 hasRelatedWork W2118100316 @default.
- W2097775319 hasRelatedWork W2126336426 @default.
- W2097775319 hasRelatedWork W2132895580 @default.
- W2097775319 hasRelatedWork W2143221020 @default.
- W2097775319 hasRelatedWork W2207135648 @default.
- W2097775319 hasRelatedWork W2382440487 @default.
- W2097775319 hasRelatedWork W2392993578 @default.
- W2097775319 hasRelatedWork W2633266953 @default.
- W2097775319 hasRelatedWork W2766306310 @default.
- W2097775319 hasRelatedWork W3208025413 @default.
- W2097775319 isParatext "false" @default.
- W2097775319 isRetracted "false" @default.
- W2097775319 magId "2097775319" @default.
- W2097775319 workType "article" @default.