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• W2097847349 abstract "Synchrotron radiation lithography is applied to the real dynamic random access memory process. Two full chip x-ray masks whose overlay accuracy is 19.2nm (x) and 26.4nm(y) are prepared. By using Canon x-ray stepper, total overlay accuracy less than 45nm is obtained." @default.
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• W2097847349 date "2000-06-01" @default.
• W2097847349 modified "2023-09-23" @default.
• W2097847349 title "Overlay performance of SR lithography in 64M DRAM layers" @default.
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• W2097847349 doi "https://doi.org/10.1016/s0167-9317(00)00384-1" @default.
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