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- W2097896908 abstract "A compact Plasma Flood System (pfs) has been developed for Applied Materials Precision Implant 9000/9200. Operating in the accel/decel mode with 12 mA, 40 keV As+ and 10 mA of BF2+ at 30 keV, the pfs demonstrated 100% yield with 10/sup 6/ antenna MOS capacitors over 6.5 and 10 nm gate oxides. With 0 V guide tube bias, emission current is about 240 mA at 4 A arc. The pfs is easily serviceable, with demonstrated filament life in excess of four weeks." @default.
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- W2097896908 date "2002-12-24" @default.
- W2097896908 modified "2023-09-25" @default.
- W2097896908 title "Plasma flood system for the Precision Implant 9200" @default.
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- W2097896908 doi "https://doi.org/10.1109/iit.1996.586386" @default.
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