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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2098057902> ?p ?o ?g. }

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• W2098057902 abstract "Abstract A higher goal : An on‐wafer crystallization process to prepare pure silica zeolite (PSZ) MEL‐type films that is superior to the previously used hydrothermal process is reported. These striation‐free MEL‐type films (right, see picture) outperform the traditional spin‐on films (left) in terms of the κ value, mechanical properties, surface roughness, mesopore size, and size distribution. magnified image" @default.
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• W2098057902 date "2009-06-09" @default.
• W2098057902 modified "2023-10-12" @default.
• W2098057902 title "On-Wafer Crystallization of Ultralow-<i>κ</i>Pure Silica Zeolite Films" @default.
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• W2098057902 doi "https://doi.org/10.1002/anie.200900461" @default.
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