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- W2098069884 abstract "Summary form only given. We have developed a manufacturable FD-SOI 0.35 /spl mu/m CMOS process with an ultra thin TiSi/sub 2/ film. We obtained sheet resistance of 10 /spl Omega//sq. for N/sup +/ and P/sup +/ SOI diffusions, and saturation current of 1.8 mA and 0.56 mA for NMOS and PMOS transistors (V/sub D/=V/sub G/=1.5 V, W=10 /spl mu/m), respectively. The feasibility of the process has been verified successfully by fabricating a 128 kbit SRAM." @default.
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- W2098069884 date "2002-11-23" @default.
- W2098069884 modified "2023-09-25" @default.
- W2098069884 title "High performance dual-gate FD-SOI CMOS process with an ultra thin TiSi/sub 2/" @default.
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- W2098069884 doi "https://doi.org/10.1109/soi.1997.634914" @default.
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