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• W2098371716 abstract "The demonstration of a photodiode-based position sensing mechanism for integrated feedback control of a long-range micropositioner is reported. Interdigitated aluminum-silicon photodiodes with a responsivity of 0.2 A/W have been integrated into a linear electrostatic micromotor supported on microball bearings. Using photodiode signals as feedback and implementing a proportional control law, closed-loop excitation of the device has been achieved. The microball bearings provide continuous long-range motion, while the feedback sensors and control scheme overcome the random nature of microscale rolling friction, leading to a robust positioning system with a range of 4 mm and a resolution of 120 mum. Accurate and reliable operation has been demonstrated, including referenced positioning from a device-defined origin and autonomous response to external disturbances. This is the first demonstration of position sensing and feedback control in a ball bearing supported MEMS device." @default.
• W2098371716 created "2016-06-24" @default.
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• W2098371716 date "2008-10-01" @default.
• W2098371716 modified "2023-09-27" @default.
• W2098371716 title "Photodiode position sensors for integrated feedback control of a long-range micropositioner" @default.
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• W2098371716 doi "https://doi.org/10.1109/icsens.2008.4716563" @default.
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