Matches in SemOpenAlex for { <https://semopenalex.org/work/W2098384301> ?p ?o ?g. }
Showing items 1 to 77 of
77
with 100 items per page.
- W2098384301 endingPage "412" @default.
- W2098384301 startingPage "407" @default.
- W2098384301 abstract "The fabrication in a standard CMOS line of a light emitting diode (LED) based on silicon/porous silicon heterojunction is discussed. To fabricate the LED in a CMOS line, the porous silicon formation must be performed either as the last or as an intermediate step. The former option requires a masking layer to protect the metallization level of the CMOS devices from the electrochemical solution for the porous silicon formation, whereas the latter forces an interruption in the process. Experimental tests on several materials, routinely used in CMOS processes, show that no standard mask is suitable to fully protect the CMOS from the electrochemical etch. Hence porous silicon formation should be performed as an intermediate step." @default.
- W2098384301 created "2016-06-24" @default.
- W2098384301 creator A5003182104 @default.
- W2098384301 creator A5019043138 @default.
- W2098384301 creator A5025908869 @default.
- W2098384301 date "2000-11-01" @default.
- W2098384301 modified "2023-09-23" @default.
- W2098384301 title "CMOS Fabrication of a Light Emitting Diode Based on Silicon/Porous Silicon Heterojunction" @default.
- W2098384301 cites W1964002768 @default.
- W2098384301 cites W1968388084 @default.
- W2098384301 cites W1969412370 @default.
- W2098384301 cites W1994466304 @default.
- W2098384301 cites W2066600857 @default.
- W2098384301 cites W2079479515 @default.
- W2098384301 cites W2087009847 @default.
- W2098384301 cites W2087497409 @default.
- W2098384301 cites W2088194340 @default.
- W2098384301 cites W2139082028 @default.
- W2098384301 cites W2275873518 @default.
- W2098384301 doi "https://doi.org/10.1002/1521-396x(200011)182:1<407::aid-pssa407>3.0.co;2-w" @default.
- W2098384301 hasPublicationYear "2000" @default.
- W2098384301 type Work @default.
- W2098384301 sameAs 2098384301 @default.
- W2098384301 citedByCount "5" @default.
- W2098384301 countsByYear W20983843012013 @default.
- W2098384301 countsByYear W20983843012017 @default.
- W2098384301 crossrefType "journal-article" @default.
- W2098384301 hasAuthorship W2098384301A5003182104 @default.
- W2098384301 hasAuthorship W2098384301A5019043138 @default.
- W2098384301 hasAuthorship W2098384301A5025908869 @default.
- W2098384301 hasConcept C108225325 @default.
- W2098384301 hasConcept C136525101 @default.
- W2098384301 hasConcept C142724271 @default.
- W2098384301 hasConcept C176666156 @default.
- W2098384301 hasConcept C192562407 @default.
- W2098384301 hasConcept C204787440 @default.
- W2098384301 hasConcept C2776685891 @default.
- W2098384301 hasConcept C46362747 @default.
- W2098384301 hasConcept C49040817 @default.
- W2098384301 hasConcept C544956773 @default.
- W2098384301 hasConcept C71924100 @default.
- W2098384301 hasConcept C78434282 @default.
- W2098384301 hasConcept C79794668 @default.
- W2098384301 hasConceptScore W2098384301C108225325 @default.
- W2098384301 hasConceptScore W2098384301C136525101 @default.
- W2098384301 hasConceptScore W2098384301C142724271 @default.
- W2098384301 hasConceptScore W2098384301C176666156 @default.
- W2098384301 hasConceptScore W2098384301C192562407 @default.
- W2098384301 hasConceptScore W2098384301C204787440 @default.
- W2098384301 hasConceptScore W2098384301C2776685891 @default.
- W2098384301 hasConceptScore W2098384301C46362747 @default.
- W2098384301 hasConceptScore W2098384301C49040817 @default.
- W2098384301 hasConceptScore W2098384301C544956773 @default.
- W2098384301 hasConceptScore W2098384301C71924100 @default.
- W2098384301 hasConceptScore W2098384301C78434282 @default.
- W2098384301 hasConceptScore W2098384301C79794668 @default.
- W2098384301 hasIssue "1" @default.
- W2098384301 hasLocation W20983843011 @default.
- W2098384301 hasOpenAccess W2098384301 @default.
- W2098384301 hasPrimaryLocation W20983843011 @default.
- W2098384301 hasRelatedWork W1491218888 @default.
- W2098384301 hasRelatedWork W1559024850 @default.
- W2098384301 hasRelatedWork W1964002768 @default.
- W2098384301 hasRelatedWork W2030846261 @default.
- W2098384301 hasRelatedWork W2058676402 @default.
- W2098384301 hasRelatedWork W2132585519 @default.
- W2098384301 hasRelatedWork W2242834141 @default.
- W2098384301 hasRelatedWork W2292920207 @default.
- W2098384301 hasRelatedWork W2968464688 @default.
- W2098384301 hasRelatedWork W3027603277 @default.
- W2098384301 hasVolume "182" @default.
- W2098384301 isParatext "false" @default.
- W2098384301 isRetracted "false" @default.
- W2098384301 magId "2098384301" @default.
- W2098384301 workType "article" @default.